ࡱ> nv@+ySPNG  IHDR  6sRGBgAMA a cHRMz&u0`:pQ<PLTEٟ pHYsnu>IDATxo}G'rh/z.e2l/fgRݢK*~q;#)*EゼV^t@_t].*MaZt`uk;ҝ$JCQԣ?2/Iῇ$ zAЃ IXAЃ A z=AAЃ A z=AAЃ A z=I5F@Aq'I(f$]ߗd% 4 bMHGĀ#re'#DHq  .٪XqR\zmZ93 w !A!AzGBT!Arx!Az_Rn/Kk1_"Z|A=lj 1028 sp@F@Z|A  M 3vM5 4,(A=PMCPcʕw(ޭ[U9)U 335Se6ه|@ה˺bj|}}8hW݃)!U+T$`5; R@j{00l8u߇-GЙ)Woнz @{G !QXvٮ]J20[UZL)m 71mUTU *upq@rbJZQ]d @: 59rќgUlD(HăL |4:t Ol=f;"<|pa62]V?$I%YK)-〪l.YR^0$}ju[ZʹS&9Ddt]2l8?x\j+^ADʽ#/I>e 7vSzʤh6m=h`A;6rFo>.!PrȱDTzuh @ϙ'MNdY1ymb]BL}%}uef} Pu1U]lΓg4ᠽ`M*/]]}TE: [ .h2,ӸԈ4ZBְ\ϑ$~Ԅ*mM ЕU]n^,.A@HAִ>W-0VzKPoS #ȸXPVwJHMjʭq t`|aWv(M\֤Sy|)7GqeR7(U#B)hg4vCAG㦛u(%4*Ŀ yWy,LĠStnD \^==؉QăHRAOIC<q⹿|i&B3}C8w7S4HI5:}h#i EIH86 [ у(")lx&' R8,f{$+)8F3 lLWx2jPf@Y\A  ,2$$#St_M.OF+"J#y BDvڝ~4n3$ a;?F@AqH@l"DAz0@pb DݖM c4s|"(F #sgb  (9@ (xgAfv$}noZT9 p@DhLl@ 7%js }J<9UIzJ1ϩ>|~Uq!TJ$*N /GʹAJNKn[p֡*{mS逶B=:P߸WR9\LCG-䲹\~!)衡-rwJ\拓͸%,Vrrni()UC_Է^gWٸ3–{ gUiG7>ZqmR)ۃT+kkk-EFʼny*#)!7*-]+fV *GEZJp%](HJ ͂)M5FD JүߞWs]sN8Bр$...9?-L jD)`*!|"wE)ryZD5ZHmN>+brj9 &Sek(@/5y")2T3nD2}AD5eX-9GTsh:;E ?2՜р.)L@>/(<x.@YjXWxvF@A|8M7F@(7 APLo6b 蠘ޭϾemJ{bz/x@c$2Us Y{Џ/O<@Ǜvm+sڎ%JzLӛ; kYfb jnQLAH( }lҽm:n YvkxjJPte'L aN'ݷ4 fx=I"b[!7F8E* ppE* ppE*$ U.I\,$VX$I rЃ%$ $Ͷ;XBГ$j1HU%Dڛx6A3[妺"hTC B3<@S= G ^%!fK9 Ȝlb@̧xֶ dݖU*"O"MĀtֶ {XBkCES .$ mc ! [.M*;WB"Oҧ;TeP-Sĕu{"4{B@f~"Pmq%dnz;ڝ@v&:|Y#U&:|֊w 1MA4B@}oPȽSqU+8vT? *w -`aUR@'ELvTbw[N!*ޕcB;{MsT~t;ngNXGޠNc|Nz0@ʢb vd+wÀ(ޓa\֗C3$D|vh/ (!a*w?2&@zw0@P QUnwb€ ߩjF * yK|M}jͲܫ7ÿyF b}{϶YPAV(!]B~(2eoh _o3@T l/]lrQA 3E)J;'UdЎn|@v\\BN]Tf^߉j([GC{W bBwHbf^B#;*{O5  WlugʖήʹjK-Lx$ٶTY 倳 1%kWrU&Ho' 700xb * H2 1 E UU.)FL0}hA'9Njif[::)A@nn qibL*$B$}(}:!Ҹ yЬz#˸zkcU5 qJi]~ óLHftӽcqYB/a.Obrп@ӮC{ A@rQ F4g8c 5[!@! oW9s`cgRh-(f0AEuKbANY7~u!Z #7?uo{#hL{v7~ Q(x^ SߗYvN^ -סQTt*lk@T=^^ 5m :U]^ vDUF= ĵk0@ye47ݖq ­yY߲<@#i 4G̛ [i#H̩`4L  j֋E+\NY'>TX U/:n'x-/-xzdV*YXN;xZN^Tib _~S4bQoEX.s8PMT(o;CujrrPvnXRWj^ _Vd>E$Çf^^R;kE=3/] Mt*x8KsIT!źi ?{vwMJ"9gW2/\}SuKa/ߝ @diɹC݌^4J{cVlO\|2YXS鸕P=0rKNJ'%8/o> s:;A"tQޥSѩENx$3/Kt|}[ LU9}Y NlwX4AP(brcdIԐ*m\ҟ|N+OKnsЙTi]{L<^ k)Ko7鴿/9smqë\:or~i ܌A֗{R$MlN}9z'f_:O~ťΚqb4n@fxV9өJeRlntw$x)ӹQ&@#=NRs77Z+ת~sR tn6mnpK9rbo @|[9{zj١|-ۿkOtԩrZZJԧAûB/ _Xo4w($T;3<cA7h/9Klg)I*!"^ۨQC8mƝ!āuK}Ťnx~`|Zxv;jGar]No)"Aג7?=K%ªDt|-h?Ȓ:g%gY$ztBU"ƽ ~[ܽm[Fl,KnJ} oIry ԩ2/9:L'߾϶RQøG)dNp[ |mKgkO73Ǡψ-c9ܘn?T< ; #p5]*ܐludSGϷii vzf!Fnђu-/^,^\.43کB6uS[xTn =E$H_wk ܕc@lR-.RBeG/u@Fڒp֡słZ5mrk놶 ^yдцըʙT>k,; ~pD67H%)jK?+v,/wA j(Mi_q@^\h7r-TrܸjIv;U~!wJ$GW gN۔Ҹ*g[9j=} 3(]=[PS^4efW.h9ۡgfuxH!M鎳m@gsR d,dO~)IBĔg2[gNAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A hRAAЃ AP9Lh z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A z=AAЃ A$W&M)KIENDB`n %VM :PNG  IHDR  6sRGBgAMA a cHRMz&u0`:pQ<PLTEٟ pHYsnu>IDATxket YZJs@8IFՊ'cdjڥ> lmhdm={#mk $zŽ[sr0vlJK[%P{w.hi @=Kn 5ݹ.5{]G"h--Ws3eon>xz}h䠋ٴg7͛?-n4.߹hxEVJ\I&Y+]NWo4@OÁQANkdV9Y A` (- o }Py)=+jFJj'YJFo4FNi根R0B|^sr\.)=8lCq:SSnQh;Kvu4hdz,Qeؙ*끵|n|Lvc'ݿ{Z6wjY6vyy#<&6h?cK=ADO=ADO=ADO=A|;aZsGOCՊ]A8@@+Yd{h^D\fg?:Gg֗+KQRj^_.weW8\viQM08FԉT_^jFQjf}tGw'h '[56P&(DO=ABuw]hfO^vF@ۨo0(ˮ}(˾#2P"eoޏ ekh)X@DO=ADO=ADO=ADO=ADO=ADO=A]36q' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z 'hjd A' n eс z ' z ' z ' z ' z ' z ' z ' z ' z '֫FJKؠzPGt ' z ' z ' z ' z ' z ' z ' p[2A!$ z ' z ' z ' z ' z giSԚ6AiSI=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO=ADO*:DO=AMnl#% z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z ' z u=IENDB`n\+43OiBfEsPNG  IHDR  6sRGBgAMA a cHRMz&u0`:pQ<PLTEٟ pHYsnu>*Iٴճ}}ʺ@C5Ķg@z?v?))i4ݽOo#C,R_@(  )- tP4\DGGGGGGGGGGGGGGGGGGGGGGGG'ٗs ڹ%9>-a|LG(6TQ dbE~ƈ=!Adwf𐼃 ,bphۈ1k93P`8&;y\ L}05zC7%.V?yDŽ,^y!{L^cOq Eϯ2j_ BI m'y +*+!e اlUKh3M#N@ cs <&bwDdli= v9r)B wa uRRoyjrNAq4U (p{Ġ;A{P;|5KzJ~@GYs8Zu?ڠbfQcV` "EeZ֮-b i L"1Q`lŌ֨GlbtgA8'9oo+ kh 3:݈a@^R+ҖZY~HnmSCt b%\}sN RXJ_l;?'  ]>FFX@.8Pܠ]46QvУ 24= nOlV8.`SؖBfu,n>f;lO% 6Ƈ1ZM'A w}' Lȶt΀}5OB~/SU7ĺSH;67[H9(ӡof{/U: _uC[{/LZ~ݑҧ_\ڇ || 3[?9wWIw@5/歩\ 䓿\k_?A^+yIL> D{`?'sS闀x}i@,GmIťk, Dj@5ޜ. /5[u:R k]܃ZC`p4 \6X a8Fo 2QhC]{tntD(GavsX$PrmWPrL@׊AAAAAAAAA}_/?ZU*}w0o_9_yW4OH"J@!@@ħ_hlPξx(&Ƞ"=: r"qw/ys P>L o J6g)EN[|c 1] ЈYC53 7 ? ys}d30)%:w>$>9oTQRAɯ |4-H(-0pp BYy=84#Lm Ȼ)k4>2ϠQ:iIRZ!5(ֱ z|Ž hK%e%4J!d"7 GqߡqPPxP[=@ HJjAC8;NMDiB̫)U3=ot8L(ᜂ_œ9|q.|/ ՛,$-M;~.%dgn~6xk6h50i XF%l1ŴsЀ_ۢ#_5 b_?)g9Qެ 'Y[ aQ~Mc<@'7 J>.ޫ=#N9<\15]@WDGGGGGG^P G>~wMzǠsfyjz@s\ y9ixQrnx&1Xp˹Y?^⿩҉[qMAF@bR[ãUGn-tn~lX+ĠhJ@jϐj HbјЈBڌw ]@&ћm Xj5:iĪ?c%&ĖFз ByUvOXUd -Zw*s(*qyJȤMA})t5lXxjSGm7<fM%%A8]A~ɠ4F@\ k̚ []Q cWRP`BڞHl䐃H@?ȻUVn{A`+ȊƠQ A(X9|CǦH[ 9\"}~~Q!)ht?}qzᏳ-G{ж@I (ȰL` =C\vV}X ȥV#J=o@PO\hnaB&VdcKŸ?+ h`vzu䛹4=T<~ޙzWf1qTNm82I&?-.MtQG6 F.8JA+!*ۍ|+$;Zk=FڷX/1h3Jh[:䕍D!բ ,;LղRY07"k N1EhЖ 6#jr(UxG"բ jY@kb%1([1 W4\WhkaW5^GS ^I[ɖBeA[շk  3;k']q#Z V֓=:ÖZ(4t,U5Θ.m峯ѐʑ]-.dVR `ױܖcؠyL?3l7k9͆"S'Hd  tr|j@'3`@߹'ٝ=3M6ׅ߮4acUƠ]w&3 9(׹"^Vx;3r!~cL筊n"A) (bUAO5!:JX&o.etN(v0c[q {NwxtONWSr8&!M%@1ӺwZLZؓY6 P#B@/\' RƂU[_02/1t[0i)hȪ\ : FLV ݧo(#6/nPo|(c/:#$xs{goy_}7@A^lg^`Pᷳ{ǝ \c>ƕ^(p텴ŠO?<'e Nt2ݞkYx!N[VtL"h?nRms[SDb{=ls$kd*Ebn}شvr>"Q_Z/3 +}L@5Ա?59h%ܾUxd۾O:9J ]D;Y_+Kdga;~A . ]ZFUd1b2'ˮ\[2X5]s4ڦh #NA  Vlvtu ^ /ZR֩ bBAIo֚pe9p%dWd12GmVͫM`ͶXdu(ࠀU8m%*镾,^YL/koa 8ʝJL҇hh: d7LF)VJQ8M,k tՏ uTk-y(Wo-hvSG>}q h>'HfiծQ ?=/3t4c\Cܯ#st3r:oCљӛ鈿ylAn}s$yF.-i>TmϳqLs$bukwX\.J%fyta=?9]dtM*M+nҰ"K@NA&T1k9'kOIVs8,>x.7$rWw 2 4"')Du>kD`klxQaR}LP!Ag_5H|IfW>Z|SǤdy2 9,qI2kA>rH[ ѿ a lม-$(?Ĭxc=p4b%> f%d6PRbV`4kxp r=ܝF%W-֨?ZN@Çԭ%fAvw#d"IL40/uVA~GPVC^4(hk[-q0r`LzVhKK-UK[QX?Axڇa덆/oĊj v[6V˳__x(G(ϥ h>A9UK&NM/h/Ҝ򃢀8e[Sr82;~@y]qeq*=sXK{`]c&]8-ԡ1UdP@ (N FțF2]gf@I&L E(tc 8[A|_}|("Ǽ˯ؓ-ߐ\8oO{ |ivi(MvtJu\F!HG6f RvXM=Ĥ޶Щ^fw4 b+y2PmZbUNp_i.2]/x ?fr%D\T[g ͷ6 #7Z $q'cT>w0Z땏 6=Sd9#mYr!h5 vj/"2ЈtߎXrPŧX,#^;՛Mҫf/dA %i Hc Qk`*?0gzlHMJhl^pM-@tDv%j:>F,^p rxD7M& &FmeU[ + }DBdAQ+ݣԑIo:ʽ])'1UVOe4 g ]@$%gr2`A\Q{WDO *2QuwR7\bǖ#lut4BVTK^cٖ~a9 ]ձ;U#3u1MoTU؍۰9?_9% <7dڧv7pA@&<?'D3E ݮjXGE%cYҽJ?]Մ26W,{ :4m )њom-o9e J%0|~BK@}KZjW^xW9An,]:Ddd6#z>pQ丕c v@#jQ#ǍBsUWS;5 ǍQ2=B\So@6 4Lͥjsn~'%tznßq@}Y.>U_  g- F"Lףd>1(gsJrU( މ&K{=A2^iXۮgق!UAeQ]|+QAXa7T*y9zS{OČ{Nʵ vԺ_eY|ٞ* uŸ4e }h,voTk B߱(0vW~~%f\ >JH'%tҽ&=?فO!*_\SÓʝ7im_踄.5ɗ`7kۻ 'I lϿ^UɸdޏЂMKvwU'_nv%;o:n~h2{<(9۫ }Ut\CzWD3ݛ}v7No9ݑ/9]0`:$K̸kɺOA ,4^dv_:x Br:Y];V.>:3=sݻւ3ٵ?Ѵf痾ħCm+Z+&1FѰ/,"򱷼Ө%R<*1YtNP\1o>}K)v#?|:Ypft;% cjȮohO, h-ظcGBR_GcPOYf}v5(Aq;(r: 9ȑu@ٮC tbUS9Y{I 7n|e`Y4O /9=0wn% A7 oame lI+P7MCsZ VB'k^f6[AΒt-KzЯ3Z9;yX!̙#MM8 ӪkB 9AW4hNht>yZnfӘyKf%3E幗)(sNFO [ɵDf3޽^gbFq'Q_]9I%c'` *7;gxͶsd?P )!y  x3*CkTʹdaW=zc٩KqN=T8p.!Gµ&eZjuD^ce|{4C F+TQa. }( J;;%*Giͧ(ݦKJ]{Sm+ՅnoUv\dƠf\C2E9_Ц/LУ5k`|!rUɫ<|%g3ڈ2=uMVM|5zyܒWycBwMk@]=X 1: ,V |NȎ,_,ܻ>El :@E!%.}MoѯZ8Y ܯ@uߜ\B[1i -r0"]̫K,|oUoMA h3 3,⇄žMZ.<_+ |{`luM ХAUOО;|K!ֱӯiMz).PbNs@A.Arͼfز-FO0\b/{Eku(LSA(Qaň1=uލw _AqhP):5&#hW2r/k{z H pI2X3uD GWPր׿01(:clvUA~W}RIRKN,K*穄,EfW#l?v IzvZ1a#G\AO9l/Vu-AQ*;ڿ%}3Wґp "E}a N]5$p)(~?A,>RYV (Y{(b%DJe}߾z7 b6C~25)ra[qyeMcKy a EmY|FdV\ZJD?Yٶr/~RjGZ(`#k?XJ]> |+~ZeVh-(-(ňU9_6 vS 3>*o՚^Und\ (M[& J|o'hH )LK9VYv~ _1Xl./ùy" '/vZ;|e@4=Ay#kG㒮ZfpEFuH7ќ .]f g *R3%t<.xF$G$Su:<>wd`f^XdiJzqj7NFLπ&9߰lKh ]VM<\j<T;=l[2q hIܮNR.!r?e{:oYJHu*]0PS׵MUj<ҥr*9J"jAlR IPW!}t>TUgq`uJmUJCPz\%:*:1rÏ2L@#b֖Rd`D4tZeAOt2* $>v&1bm5pwK]UnrQxGY4A(%$4I }JZE':94e4Z|=e|_wǍ1~tV܋o2dq*'ݸku~TjoꤕKs @AtP nsƂxut0#m̈W9NAJX? كfrEkISۈ4E d sqWy2 9/~,08+6^LJ"EIZ9rY3=ʺw>8{vEmئӭ\Uܐ^=,(}F#+oќ.*k@}i@jly2|й @zӗtK4wp@T Dxp@T DEѢp@h \4- DEѢp@h ,@yH@h Z4. Eᢁh@4C*t9Uij.*.zګU>uzE?#@+ + + + + + EE<Oh Z4Ph *@+ ,ٴճ_ذ/:ڎ>ڰX؋f0h2:A 6E[cڧ6"M;i#),@İ&#{%xLI6CX(YhC !,Y6l@ a@C !{=a@C !{tl Ҁ!4 U$b| , _ }vNjSItqXAdSM8lSzB\pɇ_9vU #ǖd[ A( C<$I!@ɇ__Rݥ+!8AJ2U'8r]UGf(f֌yGB"S(Zq./b]¬%(xV s{XѮL ;H T/0ٌf"AiƠdCMxR=K*o:`Wx$MT-,vOhM@q\p]BsM'hA[hAso%]H Z=xv7d@ %,Ed% ,%RHO4ds1@A2,r !-%?'-h,- Ė b![6,(Z6,J{J{Jh1DŪrDYjWKRBW!VP5io|U>%= 7xRBG+G(\w07zc<[f]%$ 'wTZwªI4AJ4T&G'5ע^ J]ĝ];Ƭ ̈́SAV"K{߅HqF>i壝m GA߇>[ AƠ#0t^ J׬LB}P=S]׶ml7? >bP] lc  Kp[dWr(R'RŞib>'㫓(檺"&WXlrQչ໗ 5m}ՠ(b!0WR>*X J;+H@*foڛKzGG@2(b͗>t Uq֚ {o(廙bgZb׫@_]>))..T5* b5Icï]j*&F52n| VQcT `wW͙FQ/DK0 PsYŭR_+U+:8FYD; A`atKWGU`%&~C]mzW:*ز*0AJ)?z=4 +U+osNeΆC j} -d/g@^a2 U/貫SzFY"ꑧ r1:Jt{ rFY~'$g PUaUc/(s/qt{55E1MKAAl`hxXAoi 93>0ؚu^\?O$NAhq@X?}!~[wZ[9)A(%kƈd!AZ k8勵W=FUnO f}YFǓŠAly1] R7 +zq,A kﻼ1vfQҿC«Nf '=} ouF І+p+.aኬr b^@THsu[h$T\SÚEPm}t:p h+?uD \2"{ffZ~Uqnd5s#*?}iR\ UiU׹UmGoޟ k.⥲-@Ahe<فRjo73PA@eAPxK_,@ UT3,p]fv 9m,6 :N"c:И(0vym#$-F5>h z>:ڟv{s^B}OfQToԲ6w}dltd& Pi ]3heP[lTF)奩=otR^P?kYh5n `M@?; /#ATBM AD`l]fu3RR@ת.{Qz dz\سyxTؙξI2Ġffƞłr_K2nY;wOڠ tiƏٕug|yѬ@.S(MP=A uh(?5@Ƞ\H @5>,%4qhs[y(ҭ=3T5|a@/nך TݣwYNʃYފX -Q, gwIcZ ro P8i:Ю=[NjNLCjZ̵۷UAf-]MK5iQ-@ܴhjiyAmgE٩yǎ܎v^ *wvus jkw%96<6ME;UWW`weDg퓠RИSڭ#m_Pyk^~$xg1bίh̖wNAd+\~ }9-!G}UUvuǶ>dnx01 {O0K+[j}$HKhgG~ n dkɇUx+d#%A۞PAA/~BRE]vVB'Ǎby:Y_UG ցx5%BUbq4cPGyum<4c|]O1 Cl r }{sf6Bk2{h(:kN_sF gvmKț ORa{]s?Use`S5Mm[ lnjE/j{hA|B EQg -( w<*?_ƒdQ1UF@s\T9 Y<$6zZwA ]O_~U*'Ay^XDS6(lVaFiȵML(üѹ:WZ޿af{$F'5]Y18Av;o;~bZ ,A[xݹi :̇NKH{JM~6hߒ@J.]ģ3nxe %Y9nu7ihĠ5Aߏ5}, h pIA:(iOͲQ JdrIA܊f]^fsn^MA V'oG=XVPZ~KzPutO3 }P?!4DA a~%M.]oBgkB JPxRʎa31h7"-h:(1H r>2&ڠ)ɧLMe*xt 7߹wR%ߕ=GMGr1@`t!̹y2(il< :n^ _ KR4snc)lvLa2)6 {|Ar\5\kApu753OW+yF/cLT'_5¬A'_6s 2H4 <et^SKm*i7n E_JyƆz}~P,W8؀cT_FC/`D`.ߑoϭ6e lH/`='Ah*ȷ|<+]7p,+5]Ag*4!sR*\ITeqEJ}x)h-0 M'D|l\g.opK׶h?ht݇hS>֫ݷ{G̈AV#@eZ 7JoMw'l@h>U L/1(ln&9YÇ*ju9 #f}t^[s")?(gjjxecNp_ifZ}j[|w(AP:kg54IDATx_}N5eT5kTڢțhE^ @_X*A9W(.`K4 4@뚼 .PuMtvKtuwܙݽtb? ,b+ AԶ Բ Ա D 2" B 0= B 0= B 0= B 0= B 0= Bpӷ D 2"@dG9A= ̈E 뺜uyÁܣOeќh,Z3^G{?v:P9  ۱tb9a)Р6{@r@x\Or:@xd"8Թ,&Yz5I ^[+Th$VQɖYB+NuDMtwFchUAx\(LQ؆dۨa;Ȭ,H̊ \&0e岁L c@inCj r-crt|S\e]M(gq\W\I(g..&|@Gm!.7j&, *8v9=Adh'p .W5r5YPͽ)S)@ja@-ȿ,\\UVADnCFUϔ`u9F4(t< Q @ o1-Ŗ:)@EA^B y+h׋- WN{Dw>Br J-$Ur@Z ݱ]+` yA^-743[hci!24l!'\_PW0Ăn@f@ )ö!- 4cAp-?Vܭf?Dh oY_'SRZOL=T;qR@ӣi'SI  Mq֍^)t_[k͉B>:RqX:F(\L-.%c% il} i@a]n6Pb mC[e-cKyu9OZB:*y!ߴ.k@P|sW*ED4uQNY+@Rw$mm i,w@S dLN#$9;"lI#AR "#A$I5lID@(ʜ@ʑADp f4 T18( @4&z`Y Y6՜ @ .%< ?IP Svwa s2@i*@[!HZ*fNlsAOtT ŇAm 2W jJU@m UL)+R"1kP22 qe0Pwp43t]@M1IoĂ8RApt k]Ҁ`}ח[wB郰'ꭲA-\tPݗ;TTή|@Owuj卨rr,m҆n w`iѫO+\|Wy )Ny-nFt ? AHVnW{۫|w 86X!RT׫t Kh`6;TnvjU~kJ {g g;Q~CrݹF]vLvN; ͦ»{aq?إڣ7淾p75H P^}TO=-4;F S|j7܄7@S=1)OvJnPbhI;8ZX{\J`;Fi#JtVf&t¤(4a> 2{а D6P6 =sڰ D6zB@SABց:A ϶.ǣ<J=(^<P6Jsul<P6 R]Js<PT p@eťch61圹T d]D q;bP.w|)dl tїf/̀*{&?P>ų-ȴ ڟ8dgO_N*hէ_'}Zh&)~uubRMihN4}DƁ&Юm bxې ]=}A1&z[HM "@B n!tУԷ D Z!\b0˵.\PpFjށ~pFA6ߖz7 ߒrw1QZvɖ ݬ }"[n7XC.`P6PW126B:ĻA>(xYA[ȶm(LAo!?+AOැ]g}Bo܌'}[HtCSG |)ſ @FT?:| RhQ jbe~l12WZ\@n!_N]%h_Ab Al R@  "нbhuB^r]7?٪q&HPqeif B:ӈ.z5X ]Έ2i!ݲ b_6Dv<ՔnCU+5h\(UCJ\=kg唥چK^ ղ$"@m펺āh@viVy8EABP^ŀU7>Q\O|yfjTP/xq-t&W+brwjM}_G-G3z ŀv_ZnYɵkbҮ/w ^\ ߺv׻}z]t澕H)nB] h)mZM^ٍ`~ ^` װB}P=7i-t&4 ŵ4\Wh1A|-З _$3!^VXX ]'A!Ta맢_K^">}%HS|xmeUk%"Fxm~[#P3͊׋NROTx3YHS+QijFw{lÿVz Iɑ84(#r'TH].%茌VJ7%qK{DaW]QRӂ>d .}U "@b .秫D g 8ǻrŋr{7Z-ԝ02\XP0Y -]ł&gK@=L r k[s DY@]c@]k:cC@Mv@[zP4<0hxTHjA#\@ FAS^*@"TᱬqeyzAFǧC ˔ג:Sn! |xpK`ǧے| hS" p:Uuu=?|}٣ M[#h} 䭮jj&: uS yM67 A; v BO@b}gL:(x&乣#N\A[43&Ptir L&F o5^P5ie @;5 ?zPDx5Z^"UR _!h(V;H IUF Tܤ*+iD @J)TOY1P *ZP n0nڊn\I vL^3R (OtO=89ÿcP wߟ qv4E>ycW41FW 󭫽vshڋfAn1nM1pQS=ho+c rgAcen1(lQ/M*>%C\UrF܎QwL%OnF?vYJ'z+[es|lA =54AvgTd+\ӫbrhz΃wjTUEbWh7 ov lNDco{mpKjpjՖ/lJV+]p=rnM[mgB? ( -?\~ƫuj^>U+Y*A~p3_j1$uФu?C^~jά)1_ZaP. _*ڈI/kԩ"P -'vvjo*烍1~o#pCЀMZ;QErԮ&{3~9rTJVϨ[мWkvvvb m|zqn۟8MY?lT`уc7u;݂6t8 y-^}Ux?-(O/ufj _Dkt:?ڊnQ~J$9෢C'.Qy;߹j6NL`@&}tAxdOTy{U+/lcw̧[PɟRI+Y=+ z-'nw+;T&d{G7Ñ-_ '`@oчo7axGa,D0)jWUd= n-)ol@?岐2l!?9h/JVs[6ԢZ¬ťh>FBrTL:,' 'WK?jP ff.H렀iGjw,/8H:?W@ DTIt.J7**8 ?qJI4;H%؍Q`SrLuUHP)I.|t 7KmգSA'sMd"SA's+n$Pd}2D1Ɋm 2}LT*D :QbL eBb*+^ rt vʏ Ju=BA6}PH" P@ x iL m ʫaK P/TJS&ey|69 ٜG 94?2?vP`(ӗY $@YnZvYP#;J )OJGMU+ (I@rR@ TN_-EUFFDh~JvjH:@S. q;m yQ>bb-y`*nG xF_[)!9@gc&25s:2󠅊 ?k=XgݺzRC@љ}q!9b>ΰ1n``0"W^`@դ[tn$SU rҦ(@CA4P}JωA u%AazAazAaz@۶A&AazAazAazAazAaz)hʼAY7?"@ azAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazAazTa8чAazAazAazAazAazAazAazAazAazAazAazAazAazAazFeDIENDB``!ԙ ƓdXMT`p` n exR+DQof7b$G i(5+,̬,4C#⡨镅 ; Ԕ*YHV)9)N:y -XHզE (cKyZDx7H_gMHFN,6^xDM"D,1.-P^Xbe(OeD$䪈;͌[w<5ML,ݲ24EMF IDATxol#Aq^6+e<7=^ƊG2xQxH=xɁfOJc PQxі] -݋Rؾ);g_϶2;YuϏ~_i=y>GdE  BO"CLDzGzGzGzGzGzGzGzGzGzGzGzGz8C7Cl Ax̀]ul :c>NjcH _mc'gw)P4 ?=3ԌB"\rxKz} T XS|pvpf+hR!Q*Zh8 _P;maʞZ.(H PP @7++wӜOߺ"io.˯O"najnzp=Z^tGӷ?\#[z$ VP[Q]~:W6u7Hf$u$HY-+w b Auc=F C$sYvThaPeVp+PrշAĮ(9F r*\K>< (!l(p@z` kWsgZ+!\:Lu~ zr̪ de:~w -QgwFё@ @V*Xrnێ;[wB,,o<wsVb-*J^_IS7QQn*ZeaNٟٺo*:BQ Ae?\ u9ѩN=,kwn/:aO7\qgT1$մ3gt$AJ㽼 k}V~ Om^ z. $l$K{XDz.1'73b2nm9@_ihieio72%~ @-?*znkT0 Fʴ;m%҃aZ @_ Ze@ P?d2y҃A+ tE5dud C3go8CI7CҁA3R(|bO,GFt;B)S~N$>ݥ?83婿<'NA~zMs_hC]ipu$H=j$Yr=W~@5G ^!?c}_k<~raP 0?#@Vg4H(٫fqq QY4}彖s(~:< h{Mw仢n-_-U~kq{-(ӎGzZ,˚LOF~< bzUyAT7CjlEA:uwVʆSLYқU[vZX іp3a$Sw / *\voZn%X VK|]XIl\m}]rVTdr yktߴ)/9OR Gr *I__ox4nvQm΀hrK!T_ f(=o aY ?A[d/^tj|4^rMeYɌSԂ%W^}`ڙQ@gA^&_hs!bX-ƽrDBDUW6dԲCHw%UnW+rǗ6Nm L:6޾qo6>Ho8 _E o%mO6:jg7ܒ }3LГ$ Ifj:B|DG>٨.?'~9V@_օAٰzw7qUa@M;-AzQ8cG 1eA{$UPG-][tWULN ivrILPdgBWfaLҒ x®Bbׄ=Nm6q5`@%+!c9lyg7p6ڙvwBsPjhs^8 bă;g'%4e_3~wa( O-Zp3C\b hAj}ap@O ld:P B?@]:@ @B6Pd:M)a#?+H=!cԦ /頀|j}*LgL T2`ܥ"8.98Cq D%7C3g=L$H $$wt@B6.He @l !H $d鲁l ]6 L@B6.H4I2e f 3e 3e 3e @l !Ȕ $ϔ $ϔ $B B B B B B B B  ?;Sftxةc/AB B B B B B B B B B B B B B B B B B B B B B B B B B B B B)<]2P -H B B B B B B B B B B B B B B B B B B :%yAؠ<}P -YGzGzGzGzGzGzGzGzGzGzGzGzGzGzב $B B B B B B B B B B}yShA AAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAA$#=#=#9t$\AAAAAAAAAAAAAAAAAAAAAAAAI?{%IENDB`n4!4m8'nD^PNG  IHDR  6sRGBgAMA a cHRMz&u0`:pQ<PLTEٟ pHYsnu>4 IDATxp#}$4v[^MJʸZdpϵ[MSOL3NFwOmigQ8GtdXjORO~رmjPvrNZֵ`XB\/[<,x/{ݷo>pB{PH@G="x{$ # H@G=x{$ c\A H@ I 9l\ᐁ,$)p @զz@l# b @w@fF Ĵ퓔 {@::"m3$`ǰ?X渤 nGmso ĄG?(2[)a1rrɬ@NLއ H:xR"v RP;j}w.|ל m/^nëBgdɣeCűS _lPWrL|/<7ZߒvCҹyuG?$N;-aTws-A%` ZY)w()aPk u /ꭕ@bo{е)QèqjhmT`k\Aq-9+N[ˇti@[V- eAP~\!Hc2E8 iۏ(kRYH<`z rRD]i .20H f %`X~Zk+-؀AC=4VKm΁TY1 D<%dH7?\`@~N}xJ7|PWP> X@zU$f /B!HbVj}V0TZXV9T;li&z !UH)=4}֏`s] 2i{>#X@ ԘYR\ FbW,mR#AJHqvCԨwcR@9$Ĭp4},@ w% %Į #3x@*H_W^@^<@ 7C'U22*GjVB5^@cTB; %R#A K j=ކJ_o1 q ` =qR{d*G&{ؖ8u@"q h)v a ]}L! |#VB2SP/%8;% 0lCh@%$r \Ыmr"yz@2#N30~H`ٖsJHWt(Ҝ; _mBY' ѭr|8 _ gRA[R(y&Z 5"AU.Ꭼ(/HT` %єrȿM۸gNbP p\# 3'A*m:h^ǜZ 6brm%tp -.ΠUN;P`@Pm*O ّApIX$L9<⸗ S^ )!v Ty+!3;\ uU ]d$Ӭ|0Bm@Hr%N^ԇ)!ޣ3B=?MzԹ/m]`7xuN7O8 ?]>"o=-iճٵƞNe<۞<?|=mlfLAo:yAF 1hې!5kmHr`&+A]B vlTAv$ U} dF 2Dm @;#+ОЀhoCvBgl8 hܶL#rs:~/G>,H ~hOԪν]$>PBWGV /%(*_.AO><ӽ0HYRv'hLC bhE ˭,)x%ώ m[@ GV傠hP+EP]vPJUtu5)l1kf%T$+8rA5?؃^>j) i>Yֵ=ݸ$v<6Y}WR gdF ޷!ܔ ^ a WJHfߟ*A9D\B@*T}X9YԴm1;mN!@&⤄ @b6#X,(?60y @^t*翂czh.) ZeaԲ{DN[J +աi^3]~ YsvkNA#Y9br-zAіe rLeiҠSN,dByZ9mj2Y)n@k-ʋ`2%R2Cv4vXPA+=+!oBfn%qWgL!Cm YBRAJ,_.CV!65X^rNr4!xwbLiN`qLqL\becfUnh9\!H gWpdSi:@,!V T.AWO \ h8ж]Py@U9'VerI& JuPmyhy,P7}1;4Ț-W\Ã` ~ܱZ=e?\x1PH㠥PU zsykߞ+}Μ=C=D F  +wsۄ~ q2]T~ﳿB*R0͢?昐 NR^~v>_z׺EmCXZ EAAvgS7)nT%>*w2A@nC]A=g9c-bVw[HPt\&di4@D ;{B $@ Y ٹKuL`{}d6 *P@%dLh@A6>$( }G_ؒdF wGږ%*I̕:i8@TW  %{KxvMƻerI&ЃTL։ ԘRA 9(} ]B46D,V:VO "˅dRB9Ic Bq8 H +$< ̰m)ڰ%tghI%ͱL۝U #-߆æxL/ur%T#) d%TO,ӴώxsdJr KD>OfF9\2!AX@ZwPf8I ^rtm8P,+\drs 1,Hf8RYYg} ,8%ٌ-mAC":VehP-oc*(@rkmP~ `R mAMվs.T8)ؠ< jB80*W:@JDsn{@q(P$aS*N), rqm˕0Hk^O!靋1r!9 VT.h;; ȉzNQdХۙ~AY8A2 =6 : hy$2$Vd-*ez(]UsP*  6U R~A]v*KimM*Y4FXd rE*x*) Q$gGo'CnerIlE)mtXƸ}mFNfVQTbt1cOWDUTe!cbB=~^rdy.;)'e,x>9g;., RnVg IaJzV=ϩ!٠i)-{?t_"l,:$>i ڠXZ7")BeKy\`c}@sR.ӈ 0ͻQ^龠z r$ *g*nμ褄GV C / jҰ6١?!c+xQhܶ}pKy3_.aK+8^wP8^ 6}F9<~* Py XzN֢Q:cB⠠`s «q֋kPS5#>Nđ^;i)xfPNs=1$4w=W9B,ɦyo8?2*X[ 6H,xyw4}T K({meˤʡ@uRZ Ոm(K@[\*@ D$QDqЖsV74Z,}>i  d7}ZQP(oZBLXU{=J$}:Cim b |YBAV mȮONU 2 EeR0wJh$0XX$仮%DwقgCϿrgN=lxW w3N TL^~g~$d2sDŽ<;:I?OG{߀?~W~k__g?.0\J A!t"%üs}z(T1X~U^}vwr/ *'l_ YbL*:q8ty e.cۆ.s+ _B܋9J'~zmU6$ė-!Sr4g_4)YBKҷ]1fäMkcwДO[ې.|,'JV*FL B:+StP eY DoR;C<ٱNJH1wX@ VU:@\1.r5HpYB#d;&g r[7:KŗiȻELAn8m1uȩr)*,9} w^@9s(!J\Wv8 5' ~& ;4ǜuV96wuAL1:]'!@]Pgs:K)X9@4Ww@F)FPuK.QANo#q=h@-5QBM|V973y} t9L=6rH. H|\~7;q Ж4b5)-ᴀgf wL'wdJ2zЌ`jZI8#gK2Sd<"Pm%FSFpm+Nr> QePNp3:-=CsAdݧj}YOHxcv*>ȴ?J[ }rP\i̼vDwxRשNz}ueU^VBזOL]B V9ƴA8%ձR@@`)>Ri} vr]Bqiפ=%@_:!ߠle#ȟm]6HQاOCP{gpLTT9wO P\AsޥHc (ȋ 9n_T ԞG/kp| H Jc:?KA " Ü N@ 6, eqRB~6F4DSnuJ PCHpm7.rDZ @\}0 n H $rvhp` {P9EAP-*!;3=Qu|nAU><Pw\`B }Ji&ft   U_k@c2; z^ebjý|CoN2vNS8-3" ˞UlV4ze`339۟iI*W͉J~RogP[i+/9  *W:Z mwASA:cMIIPYT$%?[<Doْ@~F4M3"kP{ tpdU]D A%8Sq:͸neGgJ1T !r+PG@N nP@WL3ZJ@R6k쁼ֶsZ#^YLw5 %cs<^Ԝ *"tRv M[ 1^T VDY~eMTr*pl) P8?T$Wf )a8vBrK"ֶ,G~LqZmtP+rA;& [L! j>9"jupHOI"u Ȳ]@;*T,"m]@b6>w;'H@gSfL4~i,Г SH K q*5ػ)gѥb2.P@]+ABN؅dz)C =X"2BSC!]t@&SPUFPQL$v9)Q&U`j;)!9m%d -JcyFAVT=~|8[^@VlZ[ V18XD@#[oRCېIAVN %م-W-{ JC+:.2QωtbTPخtQRR&R()l/-4$Hn:@ swu{Tϻt]ACߛsA_AA^f1`_* ET^ Eln*SP i@$(SJ]UV,.Y^_#OhېH E%6DCVnLƨ*+H|SP 5NLq|nJ CvXn%DZ(x <,egϼܴ Tg!4|Q؂,PM: igjD\6 YkpI2uA<@ xYCeTJ@ (wϒ h\6ѺS J/  pAH r Dx !XGe؁}X83ixJigS4h7X n)a ty >b"@(CĿcs&_ ьaoBTg zY&@xnd}i7x2 | -.UP[<BJO*uej]XY2Nr  Pz}v~R1˓BRE|\(N.L2}@δ(."čXYـ[4TdQ{ϩTZ5J%5o-ci,(m/-K)*@M"^kU<7(.Fi*-G'؜݆<$锐*ɉY xYUY)cP \R`:{k8bEGDTЎZ)|' hÇ!8 <P6tJ_QQ^үo2چPm hiw~޲?lHjD8]ZwPD' f;O,>rҵfퟧӏ 1NcnWg4[!';Lz`rI(і`:w!An ǨK`Pi ӱ QBї}ڠ,SHAm{?wX@Dچ8Y~SnNA^B$y117w(@-Kʙ#aTBVI#>_<3{;Gc>G)%$Uo}=-GRQDz Vksvܹ"wGT:>9O,)˟tH;~kn @}_[1U &Vj( =vDn~J>oO+n,@# { 5F ҡ{ uX)T}:"aM?h!CPkQ j()u VU~, 2%ANcM1 n㴤в}? r34i " jz zRA/F5}\Bm'RB[_RZ݆YcJM U]L ׊)^Ȓ!7'P?cbkb 9! ?&:Ǥק5/ T^pjσh?T&BWrAuXBG="O aFݚ였:gaF >Hgj+1hJgI} J2}~@eM\˧.ODћf7fl:7&8"ؠʩrO9{ Z)eD47Uf/WN s1祳- ꫭ'+ܼ (j8A־r uxr A3^gAғmPކ*d =Ѹ5j 4 닺 j f[=-S%j*7𚶵ZĮ//[ 0@X_g,a6LX}=}.\^laЉ6([ZMXU;V(ܳyDәڋO}LĄ Bl?aE\]2DcN=7ucDiH:+`V+q![>+^{nL>P9>f2p*?ya|^ڳHRB$T kT򫥉q}nܘѧFې:@'1cSʭ)}a} h[09K30d3:ӨʁRVh Jz)9(zڒ> Sۗ\jSh&0PRhԋWeEjԭl 2lVo |e댊KIF6"@K!__\@ÓvVw@Kt<%K%8bv'cꤞ*8SeWdx(khr +򯫭LU닭k _aS^5 l TSϛtٸ r~$ZAŸh\ܾ\2KIjݚReuJhN^oÌڥwNϕ6@iWrZ~ )^|v/U&fJxH:E`FlAE7>a6+/W;Hܰi-<8P?UM0e /^V|Ҫ&PP1hZ,rʘ~.w5m-hX*V=XVGVϽ3ZIR 'lOljji]XA{Z秶g ֬2K0}#!;~^ֲyT\B[8 XY[B%E *-lAz2l. TB0%~,A,l_3+֢Ymc̯O8i~D^]*M{'6AOϟHmʧ7K(]@w#,+F~FgQ&]Kk0Z !%k $..N,6)\`a3! e}1CaҰ&y߁6äpgyMaS~!{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@LjA؂G=x{$bﰁ{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=x{$ # H@G=xCO>3cdIENDB`nBcyݹTPNG  IHDR  6sRGBgAMA a cHRMz&u0`:pQ<PLTEٟ pHYsnu>AIDATx|W~xP%a&` srN4&Foܳ.&N?k6mQOu <0O MT c6M{}z}|v- ].&i]Y5^9m { >%`xo޼y eav,=,.  d@f d@f d@f d@f d@f d@f d@f d@f d@f d@f d@f d@f d@f2 i w} 8BaSH;rHacȀN*USn2'cH'jOw>Hʰ%@{o=D@U ^a 0gkۏ lIQ\|8LTZDл'}敦j>SJ-HCjs:A9 ,X@*'0AAJRK%]Zoh* sJ"B vH =n_UЉjjݒj- (da l6Pr(VA΋sv@pojlm(841PrW'V1vm8l6u|v,_y6sHz ߧY^GZ 4 r"Et֑д3 ؔFm3#G+][РAs&.6-PiFƝ%Css=!ܧcly8ax>H΋ !6 㴀7]N]ItžtƵЫ<< N4ι4%3/?(Vlƛ HG 6-&H UA'%zx$$xjB"Z9 ào @ BAc^A]Ż \U'y7·e/c yp$hJ{&Q k"*YRIzvZbf~X:ǜagnV"U4/$JBw׷AxѲdIT1 KJe-ĽH "U⹄k8K&4$1H ~J/g~8_qaPcĒpC c#xW \Ġ$#Vu*с#6-;b^fO?H~\)Pj:9 "WŷA\2]CŘwKW1o}jxO:bQϠAm H ) Ex}8Bb y0v)s5 Tg:t]Ӝ s{JH ȼK:hyΣGxdq\as`Db!="C吸aq; s7ECxGO 8!1wxǪj`AOI@zӖ?dLUV`z(PЎ Kh\z{v"Rg߿[ۥƙ&5n5Lw!B aր]4j_ II&e>T Ǚ)H!JU@Uj@ D:o!}|#!F(/ZLK)|t=Wr"@7ܡ}WHR܉p8J7iok 9Bӕ⿆uwlZ\ ޹r;?MGq=Y}WWF^m[[ "͉'{rq!P[97~{Is$(û/8>g #BRmV9|ρs1* Lcp -r@?69Ҫ#//a{(,o|s@8dz @ #PˉP$k--}Ʌv(G t$*A'I(O~Q[M\ȷԹ|U]9qt'$˸_տwΡ5ٍĖ0(浖993R.ΤΠ"ɍm7<ͩb^i+9B jC9|&1H`9yȝatEDWA*x/y2n*>9ObS4}{z`k91ͻWM ]u\z{O).]!xǪT#(>Uˉ*<~0yє$,)#;E"*c@B*R ^GԛTO:|hf.3Wa${X)8WLe5VI6 A{_\3l\.2 n!Y{3V/y{_B:@ʳJܱ6v!%:Dv3_+,oIPJEeqZd q< ^m5&D{4*,qڦUPZNiT` #@$C/܋b W AA#Px~LAq%B 9FWu!z˶Yi S5?]b w M- /G3aܣ[)]%@;u/N tA/o ӬTz E=;z:P"Nuz?A ?wWÞH T5\DQeUÍN=E>+?taqgFPi=ƕ ߵ؁zz;\83}S7ʁ_4P=Zھo^o} 7Z vם]~)o=w{)W\'U?QO~OO5mKՇDDm{6> @o?zkOu(`?~C̰ AW5sÖ#.s9 7ip԰u1SH}[JC[Eq?Nȕs)仵[nןo|愎ky ,"'@Þ@í98q@<&vBSv۹vp ܥF0H/+匯zw'CadGA<bkm9t\e/5Aoz Z@I#>/XZ;CTûZAhZ)}b)P!PG1m}s! Ѓ=@TKRT[puvA&B@j8,~5bY;W\`~mߗ3>!bD:#7P={lie?rI!\ 69%(Mb;Vu(".틃Qxg7m5`AеZ/Wxj2@3GACGo Eh献3MLA09 QJBV ոbB{M原 VJ xӆ*ކ ˲H~;h:w_`4߾WA{ u"C{l~=L-]gANWA|g;cF~#2J=J"!ȠC[DƼ(h ƫN=zfB;9pħA a fY5i*PItTAGNׂ"@p H-㻤@ƱqV .w'MTҨz2$Cm(AI"@r6UP"*e #m/jG˛@8+UHb}pfCҝ׼ׄiswZK9`fB}VSÆ+irӶ 26Q*?b@l:Iró4P.|nM9 Wl,nc=;ZЂbiˡW*q0Y$}P^$)\7Pw8(3z!w4!4,jBb&<+rmp@$jI奃!*?~&gG.D-yUjj( laNx:"Im9; G 9I l6'EAA Zd<@ގ9g?=C2 xYC"4\6TwAr1(8O%ZscN{&x~\@Q䴯͍F]!BTmxֆӻCB l(eBd@0 jH@48>Ћoi "# _W $ͼk S,:Ns}hEս F{c(rq|G4g? PqOb*s?w2 Tɂy vCA+BuD[8xp'Bڧ\y[ӠubڣhoAXX2FۭEeChΟd@0pi U8oyvK ɢ^>Wyy&t|/Wя1BB umff"VAjK1(o|'؆~>{䱷6jzwT.dgfAщM~xHk33EBUzȀPp|%,? \j @)FU te o!ola *@ UC42Gu|'EZ^a$gyowC@uZ~竽mC@Ku)*k jUoBY~9E xIF-'Rqs2ctvktoxXSl; E^Z%0korq Ơ !m !7; i Ơ[)*,#bP FR(ӱ蠱@N҅j鰏asBR@d(E~;;Q9foW"!OaK4KrF-յn*{b |zo3HhK?>U.HϸC ’"R7<@y^?hDae ]ģR@4e >Vy p< ul^yRq995EBYdb$@8lARd@t*lJ9EroQ/N{@RG,$Ki,iWmm1ٹȥO .?q w'AKhɜܚjiC6ч;B@2XfWU F:DG-JO9ÐS[`M>cKdC]R:Ȁzt\L8E!t;H .Y. d#y$m7QՓ]@9B̸c-@e8>]B R`Ўoi&%\LdY_s%ꥬ41eGAFLYzA;*KV*  J\m߆^"Rx( l~n4䴷wzǏ&9* ]@92 zGqncMl¸:sH}BhkKs,1ǰ?;%z۷"H5JZ! z\HnȀ4Փ 43(ALA\Tz-R+MiG98DЮ g#:$~$DcȀj??@C$&ÿM BKa]VwROQ c%p-9B _H<Ϣ{^LꙗV>d). 6[u?u‹}7O/bMlR^)ƚAy6 .;VD<\b>Ob(d;h?f|*y(h7h4MC4h 2!4}2} _j!E9ucWzS :71m .7:>}-;{'i8S $4؝"WMCPG#٩TѵN D]5ubXZ,FhgkKK Uom?uSR$UC%7^m_n޶>-~@,W{|y@iDTP~xi5j !>3G?#*ʏ"4XHb F~AT%?SXz فh)36t?6Uh=Ȋ?[kе8atjU!MzL BH_DA-hDENPiAE,+LIV:HO1yZx4Vž9צc]sROKstwB;G||?APU '"@3?[ĠO`PkИ Ԇx"q}*rH]Oh#@G@A_s;1_U, 2o!Ɖ7׾ @@L˄Cd7UȜ,3|ɇF}'Vl0XAcb4k7Gu<2[p T~_Y0܆ds wA*bCP<F~r!禕Dy"AS:3ɰ^Iy|j2^X'A-lEP7)rsH+/3ִuSpK=W1^gl(r)cmH.~vֻ 6eR  s?nJrtImCk"T  $^=74v!`R;Y9Y-0$M頖mħ?MqJM{aG m5Qf1HA"ËSW5r9ɏ9>f}ōN7]ǏyFVj(x˨M2P;bw9V  &|jyw Ͻ^)G)ć$.r<|m\ ch*5S6Tߏ3C;um >cP߫oO[{}nm>ql(_]H@_^(8,En5ohA:6D6D} 9Y}zؚQj t G-l뮝hDg  T Nqq8xՖ=KT5{tg9  B󔆤C/.8cy3ծ_ך@^0%Z 8P[@^w' qXv2~ðBsiF?&CJHk7 @Wmx0;hĮ"w*''a׆:TM' }3 `ϼ%;"/ԧSZ!cKBJC$V>d2"IUN*jB|RA M 4:0(x]̤(iN[04( hagP PW  +6Jrz]b*'/Av錐báR} Iα; cCZ_;8x@H:XЪhLN4Î8*/vusJ0ƙ$sIxUQ443QTM1 9836"ȡ ;*ջOzOdh~ˏ3]LP\{|>ctPX ;HĠM `|yahE\F^@) K UPDU ˟O }_ UB$@kr+oЃP6c]O{ ft/IQ!dĿsn6R:]-u@0"7D!:DKm=x 5$fp\^{VmЗkojٖrhl{|]vrţS0}8D"z0wEW|k!7"7P/S̃ Ywf<6pv"9)ߟ'JGvt[w\Y.SߪU U I7W}jI[T=UE(sSBք_T]EӍ -!/RQѝB Q8b)o3HmCt )}z-w Ԧ@'_ Dӗ$ vж@boh| /HaQ^3H%)v/ N9QoA>H@ENTzmK9=t!3AJAîן?7J =4y(: 'yaR|= 7kQ?{YLxBaɄ*^L/b8^a.dMԷ"_'/  V6/>Ү8y 0^)\x^YCO6R4 EYVyq'fM^*k1z2>J]ҋUyvKt&|I9D!QBK3 S\q/nc01sԺJn@P{, GWvH;Su?9Dɨ?nQxb*hf@8Sle;['}  gyv1}Us.19h,rzT_@[ RE?3]Tyk˘P"\Q >4uG[G:fu?*/l-zH*rn7e@P P97\ *aK[>@W/okI z.2RIq};C2؁X=%ȴ:PA -!Yt=9xHwRH*H OL_+ΗfG:],$W"䰳 kQq1oڻ$gNfF6<~dܽ/rOKW"lp<ˏ߉x7'gbeN ^Je3}gCW5'#`Q ֧Rzޖ/1>OW1'J̿|:?WJ]Z0!9.AdhA*߁4 5gy0W9\+d0_D͒v k:]xhlR/dF= %ﻅXϿ7m8 d˞&jA^Ȁr@ Շ(HT{ Tx:n& DjbVQ7$΂iV|7I@g_im Շ$Xz|~x#Omr }չk^RȀ5{3l-VzH\w*LtJ: 3(A8Dhr)hj/X*[LBq5HBDĠsba)/y&X8ܙC{tO䢼(\89"xQNgd@tԥL K)W}‘2IDATxly_/(KL^ZED@)x=〸@4h_* "{HIU"9'`(G@ AѴE2EmZրL ARqH3,Ny}wIR~$NOb>;gy&/w"Pz+qKԏ@/"wE @+qW]"wE @+qW]"wE @+qW]"wE @+(\VWl{/d́0|ҁ)V gSq_Rb(j88xeG&izR\j2P|k_f W b]4!<25gj}EUX?OaBLIF@>$h:=uQdQyD M#9Cv!r\٦\=KL\5 iW rQmWo2ePKk0`oڭm5OIؼ.)n@!UhDO A*WٱE"$ˋ9Q֏7HQ&B1FGHEL)llLrM=@(.V~,2 |bb^bdDfɥ̝diyJ 嶶B<@ä>әr@yod~rYevI՟W'9r_ٟv@q {8Aul׵.g1G3w3l\rj 6ʧL'.ao|\Z;wjB͖^mŘz:#o$$bǵ?buK^ԳpwԙܰnZڔ&3"R`B J 龷$~!9Y-=3mʦv S{ HU3\aY'LKcP1.ʌW z-ѽ*͂eڟ**+]j e@k_?g6fnP'UW;IxH`zP1~_+7ק+S$&7gpBsVIN q@u[Gx|殼3?$V=sWL}aZ@0aPKϵm/i닺qQ3>8^msŪ7*P.km)oB9sYRHGJzLʦ 42(\>r2XB9nrBdY'Vݷ$AfQ?/Xr &d%g}~Av| Ӎ37h++wMh3j(*p^ma|֢/VIN0%15#j $} >!tiŎΖ4ٟpb*?D^8%clb>@f;>N*9 W(8tpkp~9 uAQ_v=H}\K?`82 zR1FƌfcW JWK/)pՓj˱']k0T{.J+S:1XŐ oe6lKM! ))GhV-jmAW3\[Ve*G3(;&t.@`X (N2ϔX/anRgp*\ð%jܱiX?~CFsF@$"A=1 ;\K$t 7` kR@RX [je9Ic 6.o#yX3+da!1/Z|\b\)q8F H-׬SU*Mm}lܝػ!"TjxVK}@ϰ)S(NI8%9HhwyT(A.𶼅^/S A8LJM%ϞšZf3^IN}'9+΁խedsO|8RMEUV꬗+~(8Ikq``{MV 3XVRc@ F?3jG?)|h0;M廲m3$ޥ&@] J--ϊ-@U~~5Q)sɸ}<ޏA h$.XE1t|7o/'X%9/, 6Zkn ?)ܸVJA/@`蔍fͶ1V2|%ˆ,b>Wl&eU(>g"y7nl[J$&.fdЫ%% &Ssi_? @ޱ޼-ɦq(WOO{m@,su h%꓅; O ^Vם칤>&_)3ܮ)=|)Mu /_jyҝ_kéUj W h SwmQ/MY*Af,B@ @k;t1do!-y5/M)o.}iZ$3_ٿ޲+ <Ѓ2gU_Kowlyӽ+\h~%oZ2N1d]O=ZXԏm Z>LͩZ=>̾w@/ {ץ.uG5kvm{ŵ/zka녧P>><lBISԴ7mg+zvÙosP?w.4h (`9?o}j ͓WM;gi ;g;l:jN?v͞_ N&6+k>J[08 >$)s,~gW3y na O7;hPM>@3?H_㵵TO! h}el,~`?IL. e9sgRB2u@? qfɭ_ XtV}]ݞ!? m Ek8z~Bw,@}+MRt[a`m/7ި c.^W@)TtC/8?B=%qQؠD:/I̎~b =oZ8K8GӌxjفX{<FT%O.@v џ1^ @9sӕЗ~y^H5V6;XhocԖ;0go|EA=zއ%Ԍb(+ig^K_{uooB¶L3m{RUQʹ+%ךK6u1q@sd Ϥ0>d;O$,y۪/v^9{m ִE$( W%byk.vbR\?7t@샭;Io<54#ԊrZӒd>@0J{r8n4JjǽD >Hg03k8C],xȇ{ Zh+dc318-@9%p ch =1a CV%79Y@Vq6!l€ZP(ͭ`sr(ԢحU  }p嚝8v`PL1fE42[va ئ'w'Am[HMbKRnCXB=ƾ`J3DZZxZ,d Wkׂbv;3xr$:z < 43^߼{vяCg.Fc _!F˯&߻ Itsw;=HhœfJ_J%!OQr#>%Sg.}P'Ƕwo0(6z9;_XӸۿ7ߘfh_8pI;oB "5eCF竗g٘?^o{_zXjn}S:F?`La6]ښ?^k_n?|W:@_QUaֺy1ouqxSb_;>"\oּ%=$ri ,5C\7&_(Ud䤫4xKWjǛpܛPٵ?])LUjCLUڠ1?@FSfT?xiJ vY%9eDsxqfIf^}M|q Sk^wv;I:];/NPb":XGNFCcV0Ṕ__K8D(U ;W1mo\3hzʼn,I%E/,Pܣb̆ Њ5 \-9U?d֘LFo Dq&7¤xA- IrFC{Z`hxQyvIP#bs3.@ CCXݿݰj}k)*e0ܰzdž TV;ӹ\XHHX+zb^+6@FN/2{-yݾ[~D5k5 +F3k-XBu38xe$di eoAKfl#Phq!SXh5]_& n]p}^13 $wmcn6` {(k/ʻs,Տ{ҽtݬaU%fu6-вj5#{' Lܻ.VmQN$\a4ˡ?xչLhD@y6ݓW]2Z~,kԧPG@p/E@mlur:L} C'I:+\}P__ςFXno<޼|0m\jͶp|r5=w $ 35}ѐ/ԬOvO@MW fϓ;Cl\l !}eZYY0y`: h&ypaN-27TuN3jk! P"or"lW v8@Ar6@{i,~AV+ (m7XOr "cw6 `ri0FX)M3.4`\bbaX&:j\<BHMu+AGӞHpQa ?tIyՕJf|"1"I ,gMc&ܸUY"YD@VbPOU(U&Ť;Jg\-v챦`\ܥ dqw84G-}xR!ZvhLWȅV$ \JO:69'v+^SHsg~r;'( /M:*ZHj͞wfo4]x}K^@QFJʉn}|9Tl{b -f}4<;OFxRWS^g*{]#"< o0ɯ7dgSVT^bKpҕ#5Vwp!p;fdxhre3"Q)\n /__o~m@`Oyv4|!I>Ա_K9,`}E$xWH]+ahԛiiNgf-fINE-m *N}}zt|Hg(Ox륖?}P,$7QDv'SЧIe`Cs{nr+dQ_mX%vȥ\!S'|-in3TJ OH[>kۚ<༄ P??%ڏx6G /iֿ}6ثa댗 {ow{9{y@U?z\-/qag3TGɏ9GMSg7ȸm7'<D2"%y*_~;\ўypT~<RTL/KyƟ1 G&/,v7L.I^R3PYL#(9*b#37|Iޙۊ PdeO 9(M󎚘2qFdXY>Moϓ~.mF3)arg7.l(6-3Rwdau@8 u89O-N6 Tr|oO<(Yw%h+Rcrә.='(nzP[!>Qᬸ?+a|08'Ro/?Y1w_DkO \c{mjj*;ePl=Θһ?16#l En48riF#UbG8P!V,7Ȱ6ζL±(:ț9,$ֳ!1j60'Ź/%-Uڲ--*TeĪy=<{[,z{X@V@cR؜yz򲣠;t2?B?wA_Wx lʉ%Þg@Rj3JpX+pjw(҆9 );ISɇ"C qO4_mz3&@B,V4 lȉ_G\}uY4զ6ȗ~idӔVe̙) 5yAV@Գfhzq4$:B78\·[V\b+hFKpdJs?rZ.nL\Te0V)B& 0w H0QKHTƴBkueɸY@XMW:JU^%)䝼|P=ͣɶ;OBP+NUS(x)5hj@~(fDf6QA*wy1ի:؟d+j8$Bx)d߃YJH%;:(X[HbT֮8(l-Y^ZJSlIrFeq2+a5=dŶ:/I,BCФz\/nU&w*^<}V:PvOΨ?t81WH,d$ጂ876q!W^gTa(YIwqJ$Ϻ_b~M. lbVHH=Z   C&K!R ᓅ{p%7%j>=wC\m fQWF4 V#8nLQ@ћW4"ÄJ_U6 r!.paGYܡ<T)R?H3O|8ș#Z3f!b9)[͉`j. SL)x?PYye, EOq8ֳbU 0ܢR( ?>MO_aU(LxS6~5|)(2Uxo>3c]% 2Q M1l@JY;찅E9rZђrڱ޿1i _`,Ѹz|;(l: aX\oFK27Aw/+ty 8hy(N +vaK m8o>2U &*BlIP)5xY*۬mڰO(aiCRT&Hh\ȰzOXfI*}2;AiNwiIeNSq_4KTVB ?Vy&tqY\17RV)N 7\e`s2fK֪+ԙ4ۛ!AA:4J#Y9 4&-mᮀPs qzN .;#J [ax]9YHGn]h7=Ta5V_UV5#ڢ"@??I`+|pg"dzb{p5.0LIGi%c$dLueP!9v:LTe9OIfQb%8UA`ۂQG0-GEBjo-mJ07E:SAOKp!4v)*uQ)߀a"&"]4! GYq,D%+yH}{ (iܖ: Vkyb'*]Ir8BqtórcA=1ۏ9"N5 iB/>A:A_uYSjꓜ ʱ2UY5.^ *4%YHeX0gdqVKD%MPY)i܀0pTD!ìH;c\6>;,"'ړ ِYS Tp1ƴwȞط%px ۨ72u5!es?yi Tz@.f| +%?+MI"AG='L 6W|ip}bWgPuOX@֨GXh(m59ʵy[8ۥE!oyp3˪|"$y/$OeyMQ{j17Nk YJNR8xnxʠ-ߡ?Zq}"-^ ]"wE @+qW]"wE @+qW]"wE @+qWh hl@/] ty1_D"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+}\%"o$E-P'x}+qW]"wE @+qW]"wE @+qW]"wE @+qW⮗ ȼl@6@+qW]"wE @+qW]"wE @+qWz vhD"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+}<{]"wE @e/R]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qW]"wE @+qKRrd{IENDB`(     Equation Equation.30,Microsoft Equation 3.0/ 0DArialDCalibri" DSymbol@ .  @n?" dd@  @@`` <9     b$v@+ySb$ %VM : b$43OiBfEsd+['b$ ~FwRb$V"yI"3q2$ԙ ƓdXMT`pJb$D :b$!4m8'nD^4b$cyݹTBb$vtZ5p&)Y8u3q 0@Hʚ;ʚ;<4dddd;.5.g4TdTd;.`5.R.ppp@ i)___PPT12 %0___PPT10 ?  O  l         P(PK!V[Content_Types].xml (|N0H+8 (8ĪVEBpֻ3iVwbl VLly Ё9!u{yL IuF^k2#z cẽN`0[mb` \!#s,Hё9}~TU 6Ul¼;{-dۡx/ ftΓCR}o v|i@T;\/E_PK! K& _rels/.rels ( 0nS=H^DtiUۛc a)hěBUrdk)Dd gIDr*dS("QlT3Q4b̜'օ9I]e3\0ťQ.D=vtr5aƓI+D#V0;f[e!/PK!tableStyles.xml I0@Ὁwh}-CQ$ +w*!@he/?JXd45ݤ{c@qqi` yߥ>\`Y{ff` R>&- {p_/̴>?" dd@(|?" dd@  " @ ` n?" dd@   @@``@n?" dd@  @@``PR    @ ` ` p>>#ʰ!ڰDzԳٱԳٳղ.泾ɱ0ᴿ+%ư(0&7ܪ&*8f;ó6VT-Vʲ԰ʨ)@ŀ< uw}l IvVNLTL3pG|ﴉ`(UoȮy=J2:88Z )9kR /Ju"(\fhnX soiɶGgϤqsJ8 `ֳ'*e$ ީ3/zPK!*8 _rels/.rels 0DnzЃXmlo0of5OIw AN{cݠv=m 838yG 6U} ShLq`L)d=Ҍ\@.;3, ;$e͂): vq}j:zɥ'k茜(f,ƁXA6\m>ʰ!а%!/Ѳٱ/Ѳٱ1.泾욲Ѱ0^%!ͤ,Hf$}^mӜgXO~מphw^;)Czt&C3¤%L_B,G+D0ʔRI~)#`zɑ%Lc,RE\=%yo{ph=?27_b.p\/dRR%G^s S¾>T=qMC"6a63ԏgQЯ5 @IS{ZS̆8K"F80D*1Q%0Yb>&K,hCLaĺ })LXO0 I,P5j xDQAA5?z>/fF~5?''xN()QkyHgPN/maĿ%h/-bw#eK׶"I-gSvO%5%Ykf=%nuCu&=]aoqξVQѴ_-{T62]svC>֓QsۓGF TIPA.'8fwPIYACZ"QPZU '-u(0㺀5U*F !7Kx/K=%3"6AooO";Q{F4K~KJ{KnU ;28R3Brk^pedtW9A{5#PDZ4[ћDM )ٞ.%*?Z>;jq h{U hGƦ[!do S;f ڑ 1ڡ{ݰZ8=(Req[쿫PK-![Content_Types].xmlPK-!*8 ,_rels/.relsPK-!A^%!drs/slideMasters/slideMaster1.xmlPK0 -"%"!(    fh??Rectangle 2 `}  X Click to edit Master title style!!  J  `0h??Rectangle 3 `  RClick to edit Master text styles Second level Third level Fourth level Fifth level!    S  5   `h??Rectangle 4"1 + PK![Content_Types].xmlJ0*miG]`Hm6 Xwt?. g#Wi3E).+7 >ON ޑ1ˋz "+R RhB.} /<^ITխ%rHK4uK~I0xM e`|X}đ I`߽N4aG2$RKIZ)4(M9`ctB{m:f@`3n|O,ܗr޾jxR0T ,0@}WBLǬ5vPK! drs/shapexml.xmlVn6}/Zh-,|p#biPJQCRt(kR̙~t,fR~!=*23_jMDN4hո<\Jոө-IAVTଐ$[ЩDP;q;%a¿*TkeV~<×0mAJX|xKN+ncB/"|'g$lD)yQ3v'W<5T;O?U2׈3 q{i q4Z"d|,Ty-GIoHS=ӣ2_@dЏ{9b$+UT^gB&-P_l˜r86#ת9;Ʈ(_6_p.IEy0YΒyw>ͣMdcyNeУ_=TLZC&jevZ9 OvFqq Gg(+kOlUDߠ$ƣ`d a4a2JרVLSޏ;αOK8+S ,Dn@"oGb셃; ^7H0`2b:.wak$ Sln^Lw{3v8.Vn#2CT36e}pyl"L-s(4>)XZ22o uCpwR=Aφ({71Ī0_l/ODS$Z#"4q˙p,+WbSeF`1zJT[ikЬra0Jx7 ʐX]{وqN;L(qUY-a݌Ԓ wv 0rPSZܓ>|Hi'MJLգMI!ޒdy-=nD.3ܤliGKSZ= b?N K:/mƽ?Zf60^6xϵEإKp"(b2ؔ`3ԧ"1ԫKνI}A#_ȍ]#Ui*VT: j& ؞]ץqJMP/RD>6PJl̬k׶,c (FPc64Ġ/)nIJC#N-J.TR7AAVs\*-В?PK!A.drs/downrev.xmlDMK1@!El UMK=Zhf7%IA̛-תx6p7@6\}nAńlLa1an}:mSD1GuJ]u,jrG#V0*m"wgD;lX.SM ,_fݿB?Va9hHG?)_՛l, DI@PK-![Content_Types].xmlPK-!1_a ._rels/.relsPK-! )drs/shapexml.xmlPK-!A.drs/downrev.xmlPK ^ `  T    @   `h??Rectangle 5": 4 PK![Content_Types].xmlJ0*miG]`Hm6 Xwt?. g#Wi3E).+7 >ON ޑ1ˋz "+R RhB.} /<^ITխ%rHK4uK~I0xM e`|X}đ I`߽N4aG2$RKIZ)4(M9`ctB{m:f@`3n|O,ܗr޾jxR0T ,0@}WBLǬ5vPK!K drs/shapexml.xmlVn6}/ Zh-,|p#biPJQR$.de8sfs?KIBFBJt.CJ/!%e*gR+'^O7?êW)Y[;:tڔ|;GAQ@)yJi?NzqhIp@ɠB#AMgߍHW^L9BTUsJ+( @^%dr )k0 p>&YѠ7βy7!;=UȌܲ?ﴥR!93Ȟ Dvcþ3$N^F.՜w 2J|@uhNS?(Y 部^y϶@钇 ^GB+;qzjL76(ng >6)<(q#J{dXX ^{0i)3M1 [ 7K;*2{ʯ|c.PJlcw-`$%SFq8 knJ!=օlLMu8RK|;WYݒ%i>[OtPK!Ùdrs/downrev.xmlDOk@G2B/E7U-Ԃzf$4;v&~{Mfř,+& s+.dkˤBfSm[y %STPФR$~hN t(7%ɣ4Xq\(גݏQ0_>ݺ\>,zsT_@sWcK28]\91/FrzPK-![Content_Types].xmlPK-!1_a ._rels/.relsPK-!K )drs/shapexml.xmlPK-!Ù"drs/downrev.xmlPK)^   V       `0h??Rectangle 6" Ê PK![Content_Types].xmlJ0*miG]`Hm6 Xwt?. g#Wi3E).+7 >ON ޑ1ˋz "+R RhB.} /<^ITխ%rHK4uK~I0xM e`|X}đ I`߽N4aG2$RKIZ)4(M9`ctB{m:f@`3n|O,ܗr޾jxR0T ,0@}WBLǬ5vPK!t#jdrs/shapexml.xmlVmo6>`A$KeT)mu~%*BE%Nݑrd]142 `sݡ+{#L&>\#BI{]vֵ>ݬͽ1l4=khFLYtC lͨլcP5bA:j(wJ㪼҄W%I=+Í`$F*o /X*Mg0Tj$;r~hkwdJ@X=1-Du70)܋'dp 7 BgZ7&p$cG`I%p?ٝȾY*(p%h=s\. 쐣UR۶DAIvW_*]+fs*ٚhtu'Bl.bX^a{ c#$-#k7oxop}r qyMw[h2Nэ\[ZI3ɼ9'8>qԻ ֵUiOD8X#ym\pzbviYOKAإ ,=cY-*;}J"Ʃ\LR?W~3Q0Ѽ ?F| ۾KrICa6|!;58j~ "֮/,@t0loײ-$OJGյaU6dlͤL"6\6Ǭ\OG.PvC~Xƣe7 Ql E\'.c E7=Y Kg ج'.݁|&q*P!&Vl~S]YT҆KKM]x`l`[l(_&A̺Һ/xmYIΚVI_n_T7889:ս:ӟ6bn|[:ɶ.u Es.t%_Endn` mˇ޶ڡngǦf~XvMx"3huvÕ(Fo)4HkLU>''3-|2X*6a)@5*!-#u tUVkN,f%#oҗY=p\zqzdvfDT%e(]ιw9j\qI)-zjxߺ46U?Ri#Ye N[mu-+Xu DCvqia`_ty~e(+CnU.).r䫮bi"<gݿ]_awOKI .Ys]4@vp]"WVvg~0g4Ju/i/>g0h$_`FUTR"Nw"#g*Q(ᦡ01pvY> ugY .'*BvxI歪jb!^GbI8{;h&~^ Ma?e_~.ek2؊<= ǃHv%$R'{$y[cv^R^׺p,f6v.,O_BEآ2hqD+Z\тD 5B䲺&& )>ed2þIȗϐQIP8i54 $F靮_#IG5Cs0Gj$@\zN!).xj_7ݻU;!;i)Pw:_+RV!+ B PK!M[Content_Types].xml|N0 EHC-jaj; +,Kq:=ig ,?ϵYD&oDzCwO-gkcg$./XQ{jsԈHt䒦AFP0skfx(壓8?.C(ũ{R(Mb˳7{-IF#{_R'dK0FFjr'"&@_'PK!p8ܾ8 _rels/.rels 0Dnz x%ٶ6 (тqLݾQ(NAU ioo'tGHL m^W16 AJMȅ8a22~`Or[;,lij@搛}YMGBh ]pϔ{J Loc!"rPK!!drs/slideLayouts/slideLayout1.xmlUMo1W|O6@ ZTHdxm6[k"V=f{rj\)_0b˗)~^]1Ȓ%ŷ&';q0-W",XMLZ85/Yi/Ez&\tW5싢IA A&4Mf&xvb܊;>r(؛vxХ($5,SN@chŶ.Y2y|3z&x?6 xZY`ّKB"vmلN1Op"$h\oz:aK'2u}9y*爔C^W=N$T_+5q^\m)=AQ~3Ej|U^}p<a Hօ~V3 o)fauK,J ɋ% ZV;7 N_Sܡb3(Pc AoL b#d*) 2 %xf{}7-RTr_! B$) c=5,O ;o~ D# О=:G :*8k>~Uq*JgƸss$:gXx3@S*{4܏1f1}; PK-!M[Content_Types].xmlPK-!p8ܾ8 ._rels/.relsPK-!!drs/slideLayouts/slideLayout1.xmlPKPK!M[Content_Types].xml|N0 EHC-jaj; +,Kq:=ig ,?ϵYD&oDzCwO-gkcg$./XQ{jsԈHt䒦AFP0skfx(壓8?.C(ũ{R(Mb˳7{-IF#{_R'dK0FFjr'"&@_'PK!p8ܾ8 _rels/.rels 0Dnz x%ٶ6 (тqLݾQ(NAU ioo'tGHL m^W16 AJMȅ8a22~`Or[;,lij@搛}YMGBh ]pϔ{J Loc!"rPK!@i!drs/slideLayouts/slideLayout1.xmlUMo!W@ܓGUU+ۑ6êާ,l&JJ cޛ\m;z郲fO8FF͔?O>q"5rw2wW>E j6FWWU(Z' w7U;]]}:R^+!XI "raDs9/`΁--gX93PK0CV*j c%HlKLͻ[}/|dHvPփh!fB+OA+0q*ه֖Y:D̉=z,O2eXXdi3e׼$=)WZVu,/4R Q'l1 Γ6:Sxf@8ħ`YjlNu4/EKossʜUf`*/qt^$wv޼f__nw% 7?*y|Z)Z{b}-  HOp<y7vDb\NC>Gql $cJcA"|*J ,k<) IN'ԛKT^n`YrlDY+4sBBK[$N*]pI&2Oq3ZGr r -d %b Y!GE(n ?xۑBL'|19RG=Ң1b#?;E̢`h^\EL7w˯ @R6 um`eղLHƮq]'cQ7rK~nln-b%e9swiR4Dz$]x|v#T;WBȚj"TM[q :JPN|%2mdXcz5$>SY8Q=%]K:r^GRo7C_k.;_"B0Db"v'4D,&bI$)G{%ˌREqMtiW3)ҭBf)-:*"{ 6f#[9f7Wq; . =΢_rF@FɆ~#1O6CY{P&elbrA7 vtnmqw8=8˶꽃k\a>sog^~\Qk .{mW6+^x  ,_:i}a=؏(ḪHN.X*A=F?PK-!M[Content_Types].xmlPK-!p8ܾ8 ._rels/.relsPK-!ՋV!drs/slideLayouts/slideLayout1.xmlPK$PK!M[Content_Types].xml|N0 EHC-jaj; +,Kq:=ig ,?ϵYD&oDzCwO-gkcg$./XQ{jsԈHt䒦AFP0skfx(壓8?.C(ũ{R(Mb˳7{-IF#{_R'dK0FFjr'"&@_'PK!p8ܾ8 _rels/.rels 0Dnz x%ٶ6 (тqLݾQ(NAU ioo'tGHL m^W16 AJMȅ8a22~`Or[;,lij@搛}YMGBh ]pϔ{J Loc!"rPK!F !drs/slideLayouts/slideLayout1.xmlWݒ6LAg!3Mo6@@kYZ}Ik-^ڋހGG]Ո翟z)*n>K=)* ށuއ?ݵYNj{zh^2Jl2մ{ߴLm#kS>O I`:MjZ /o*g6K̈́$q`WVm1ldhSԡG L{KxyAj^h0H4Z~}fQT=7a ώfw4CD~!qM4c{Er ؼzCz;sgS)ΈB)7~j{Αi5}[~z;Sg1p([8 4&"/ZGiw * ݟ /|e?pp#BJ38lTwᆴyZqFљjUR } SP8=%#T3dֱNF@x$.ɮ9YF:&h7*P*g;L$ImiiY0ctNw&" -< nKTSH+96XAjǃ^FC]NX6u`gװlr װtgz; /{Jilߘ;xF#Mo~SVr<{h[ft>6/n[Ev̵T"fꡔ.evz ()z8H3Ŵ䘇x-zҥqLׄ2cTޛ;E% \o6@#C? T$&NtL#{i8|=&ƍq$0 R7)rO)|l;$2,"Z3略ʡH[܋ዼ0X>F'Fx4A!Rn|9nU R=`?9K4l X˭.C]b `;Tjl~7oYSQx0 O *42z&+ S]d_T\Y?`RXTS_[9*O3_1PK-!M[Content_Types].xmlPK-!p8ܾ8 ._rels/.relsPK-!aBp!drs/slideLayouts/slideLayout1.xmlPK`PK!M[Content_Types].xml|N0 EHC-jaj; +,Kq:=ig ,?ϵYD&oDzCwO-gkcg$./XQ{jsԈHt䒦AFP0skfx(壓8?.C(ũ{R(Mb˳7{-IF#{_R'dK0FFjr'"&@_'PK!p8ܾ8 _rels/.rels 0Dnz x%ٶ6 (тqLݾQ(NAU ioo'tGHL m^W16 AJMȅ8a22~`Or[;,lij@搛}YMGBh ]pϔ{J Loc!"rPK!R!drs/slideLayouts/slideLayout1.xmlSn0?'s( R8m/Ill%" rJ%%%mC.|,g;z1R/WRծn_,r(ϟ6^ESI0 JyUQ7At-\xE7swZV#tj5:ܡ$cir%Y-dpg(EkYz}0qP"IǀVCNxAu"e1̰ E&0N6 1lL#'5;X|{],p/&U\-r&/&(pOQX:I~9Fe >,n\=&xAP&ҁF.H}} pQ5~-{A._vqfJ|Ü⛹B^& 4/S0u[9nB?PK-!M[Content_Types].xmlPK-!p8ܾ8 ._rels/.relsPK-!R!drs/slideLayouts/slideLayout1.xmlPK0PSPK!M[Content_Types].xml|N0 EHC-jaj; +,Kq:=ig ,?ϵYD&oDzCwO-gkcg$./XQ{jsԈHt䒦AFP0skfx(壓8?.C(ũ{R(Mb˳7{-IF#{_R'dK0FFjr'"&@_'PK!p8ܾ8 _rels/.rels 0Dnz x%ٶ6 (тqLݾQ(NAU ioo'tGHL m^W16 AJMȅ8a22~`Or[;,lij@搛}YMGBh ]pϔ{J Loc!"rPK!(A ;!drs/slideLayouts/slideLayout1.xmlr6;w`?Ggnӛ$S<rGHTȎݧ2C|:o0ծE_p6\7S$.a4-NУKah'O?X V* - e*3AJuQ1(QK|e1vQ\OL?8`F`!\OeP" |?,fraeò(f^x^B( Z7|JߋdV(vaFx{JRxKA_?Qs04O]NsO8 cP8p-Q58Po Y0%oꨓ b/jl6ad)Y6:`}?]g-:l|'aaCdu؛#l?2d)ɱ.rC!kNX+i WOr!.Xu2J &Yaw8>{Nd,I$?M.vq`[L|EB8Ǔ?_NZkS 6~6\aW /OdkLLCyR[b}$& XI ܵ&Z@]v WDVjڂ/RF:IC˂c){.8k]n k]Su\R!A{,xvEBeJ8M{Nj8óhzh {7PK-!M[Content_Types].xmlPK-!p8ܾ8 ._rels/.relsPK-!(A ;!drs/slideLayouts/slideLayout1.xmlPKt@PK!M[Content_Types].xml|N0 EHC-jaj; +,Kq:=ig ,?ϵYD&oDzCwO-gkcg$./XQ{jsԈHt䒦AFP0skfx(壓8?.C(ũ{R(Mb˳7{-IF#{_R'dK0FFjr'"&@_'PK!p8ܾ8 _rels/.rels 0Dnz x%ٶ6 (тqLݾQ(NAU ioo'tGHL m^W16 AJMȅ8a22~`Or[;,lij@搛}YMGBh ]pϔ{J Loc!"rPK!ݻA !drs/slideLayouts/slideLayout1.xmlVr0w=1BLiKB>@EF40ЯjmB s1B}}owպZ iEP\gzYʘJ F8z5a`R'KOC iI\̝k#[h[2cYR&VPŢR(_X!]^1h 02$1_OJVӦ#HdF+acd| TݚZY@h"zQò侶ұ\Iխ=̲%>^YfgPy07-4xpQ'³٘DZⅱLe708|Npي.(;d-Q20=6)#H'󱹆dtF,^|NJKfa k")1w+9Yzdy0z(ޤo%(_ϧP qZ6]) JG&A2*#~$& rv& J90cg <'yW|Ldc1baW+dyJ*3*J א @ËVEP D,Cۀ$D'h<|AI3SC!7ȫdMlA`e"&ê$5@?`t$6w3J Sfg, =A}|&}Rtg؝:W^mIrvo>zLd>޴Er#H;B_BcPK-!M[Content_Types].xmlPK-!p8ܾ8 ._rels/.relsPK-!;VO!drs/slideLayouts/slideLayout1.xmlPKFPK!M[Content_Types].xml|N0 EHC-jaj; +,Kq:=ig ,?ϵYD&oDzCwO-gkcg$./XQ{jsԈHt䒦AFP0skfx(壓8?.C(ũ{R(Mb˳7{-IF#{_R'dK0FFjr'"&@_'PK!p8ܾ8 _rels/.rels 0Dnz x%ٶ6 (тqLݾQ(NAU ioo'tGHL m^W16 AJMȅ8a22~`Or[;,lij@搛}YMGBh ]pϔ{J Loc!"rPK!jU5` !drs/slideLayouts/slideLayout1.xmln0 ߷>%k4)p[ʲ )^)YMvCn7-ȟMIϔn:1 ( L]Ո4xzD**;bù,4[ : jcdYKi'gNZ?0,li#_ƿ[.}u˄q85=M&Ӏއ!lMc8 5S=, 2/"pdΛGZ+Hߔ;e=n;E g3{+ .WDRsZd3 ^['Z![,we}mYy:@OBy:O ?eL)^u&<1}^y{xYzi Ļh+I8Q$$IP,I|5Qcl>?ǿӪɵ-Zӂ<+"z[~Es>~niB8q5Q@6KޔtU!Tͨ1*L=,*]3`=\}^=WطqO(/x_SH B[ 6^6b}D2zl%G'pNvC }0cad7G;tNb7wl;Or }llNؓ=dSJ+S;߱|T-F>cg0$ă#_zs/p׼=ոw vI— Lw&_F_PK-!M[Content_Types].xmlPK-!p8ܾ8 ._rels/.relsPK-!jU5` !drs/slideLayouts/slideLayout1.xmlPKg Default Design7 )) )(  '   `лh??Rectangle 2"#  PK![Content_Types].xmlJ0*miG]`Hm6 Xwt?. g#Wi3E).+7 >ON ޑ1ˋz "+R RhB.} /<^ITխ%rHK4uK~I0xM e`|X}đ I`߽N4aG2$RKIZ)4(M9`ctB{m:f@`3n|O,ܗr޾jxR0T ,0@}WBLǬ5vPK!m drs/shapexml.xmlVn6}/Z(ly(n`3MQT)vR{HKAQ${˹XroT]HM{LP1>՚p)X?|OI]y,IդөiJRȊ eRDc;b5h(*yNI Bo2#z(Haˠ7 %3 #9~=رn!ǘT:<66UJrF,CoxUTcK{yୗ!J3^qp\ow]F-29f( #GfwL|p2aGQ,vhbb/knNV_% ~]kċ NUGa[\|T g(wYO]ik(`bLW8a[o(E2q(WєU :m٠xT?ɋԈ3&Y`s=HmJQv^켶fR 8X F ^`< GAgA5u!)HGm<}42) Nj2Qjs%hd)R܍Ndz֝0歷.<'eѥ"M-Z[wapoPi!fpKH׭q^_1vI| 'T[;'̃ӤGM-McI#/^دvjFIq]9g[yXG5k:1۴PX7UAUD g!U3V#W")E ~Av eZRPK!c=Idrs/downrev.xmlDAO@F&͘x1UB* A#b"ArCН+-ލ9N}yyoq"k KˤL3m;iJ%3TPfR"~h[ t(7|HT9.TsEqc,^ <]w;W+us/Ai~?Sؒ&)jA)}6R_PK-![Content_Types].xmlPK-!1_a ._rels/.relsPK-!m )drs/shapexml.xmlPK-!c=I drs/downrev.xmlPKP    T     5   `h??Rectangle 3"/ ) PK![Content_Types].xmlJ0*miG]`Hm6 Xwt?. g#Wi3E).+7 >ON ޑ1ˋz "+R RhB.} /<^ITխ%rHK4uK~I0xM e`|X}đ I`߽N4aG2$RKIZ)4(M9`ctB{m:f@`3n|O,ܗr޾jxR0T ,0@}WBLǬ5vPK!m= drs/shapexml.xmlVn6}/ Z(ly(n`3-QT)zI{IyI:(d"E򜻜O {BɄF7!%\*+cB>,%a2cBIg^Ϸ?DzU SZ:7k%3Vyͥa^d0%j(ۯ4)2`u}J$+q=OQpҡfROu0f0|HEJ3tXkur5m9'P-jKs^i5K&.lk&*lgF\ec<'83ĽCsBC˂ѐKa?yGTMtmpa<JFG_zr=NE!G;B~*])?Åtпp> nAfx1"wgt:QѶ2.HUnnRUVE[M T(F%̚dʢTՀr|][wswJj/x Hv#JP&$El)W^(EuSlVZ܍Lg0wnw9?sn)Glk.-ܝ0g)Ѝu%`$Dc0vB.tt]82K)|+I7 i%h>F')txPK!hmh*drs/downrev.xmlDAk@FB2^D7!APcvLBawkC{>b՛F\ڲqRc3JAL na,0Ӷ=]Q>CUm&/*2Ƕ%bOWJrȧ$J5Dž [z:|WOy=2|9mI~=i.mU:L' vvޣľX)PK-![Content_Types].xmlPK-!1_a ._rels/.relsPK-!m= )drs/shapexml.xmlPK-!hmh*drs/downrev.xmlPK    V     7   f@h??Rectangle 4"- ' PK![Content_Types].xmlJ0*miG]`Hm6 Xwt?. g#Wi3E).+7 >ON ޑ1ˋz "+R RhB.} /<^ITխ%rHK4uK~I0xM e`|X}đ I`߽N4aG2$RKIZ)4(M9`ctB{m:f@`3n|O,ܗr޾jxR0T ,0@}WBLǬ5vPK!K. drs/shapexml.xmlVn6}/Z(lUco AgϴDl(RIRtQ@D9s9O iVY\aU 2Ac*Ԋgoϗ?4uU3pkm=t|+\+Tbk; WYdǃNń /J=C/`p^ ;) +?@I`SϷƧװq}Up|}ei Q~`]F8PpH.ӧ, Fn#_؄lka2!C"$k/\؟eA"Fj,d)R~(G՜JbW?¿x1Z(Q_]E<dؿ]Wߔ$lEQpu$W U"7ѥuAYw&B+'эZԑK\Ix|'UJ Ƴ8ZF(]h. ҅҈tk nIeK U:^)HJu[J;g7Fҭ%gPlw8? n@hֵkW.XM`)ݐxcPy86.Y%$`=ȷ4թٙ_*q'H޼9țvJOc#:RPK!tdrs/downrev.xmlDMO0 @HHXʐ,`I¶i$% ]8zֳb5. "2U%=ݤFag IjyyLٳi(B %4!lHٞ :GW r݉y'BckB=*OŷpUZLai<[)Ƈ{qW%Kj3}V9 ǵLA,PK-![Content_Types].xmlPK-!1_a ._rels/.relsPK-!K. )drs/shapexml.xmlPK-!tdrs/downrev.xmlPK_P   T        fh??Rectangle 5"  PK![Content_Types].xmlJ0*miG]`Hm6 Xwt?. g#Wi3E).+7 >ON ޑ1ˋz "+R RhB.} /<^ITխ%rHK4uK~I0xM e`|X}đ I`߽N4aG2$RKIZ)4(M9`ctB{m:f@`3n|O,ܗr޾jxR0T ,0@}WBLǬ5vPK!Z[*kdrs/shapexml.xmlV]o6}@uP-ٲ-u n SX Ej8)w.)NV CҗM.:p$)(`Be:/$t Ӏ5K$xMfX5z쬭ǝNDśw g6ؚNmD#UӍA .Jm+Cʰ2A/L ~@HApXi&7>w1~'xkqXzC /8 sc `aگ'Psl{ΡצּGP]Od0 Ab {X,  4B3H$! {$$Y*Q1R4 ",wƒoOWuJJ)gToUsJ|W0ߪBL_Fh.$LeDE8]͓pEo1/8<qZF]D&tkee:Ḁaw\"ͳ \Kd9HV$uGjd0J(F(%s֥ *v? Fnߥg0dY#%HTKKg tՏI/ ~/Lz(y8ǃp9ϖ/t9Dw ɱhnY^R.4/ ee\ޠdh\flj:#T4t[zRpMi'OQ;(*vf: [DE5uvYτ [%fx){t:-;jw? xj[P ح04R r+Ec,onKh]uSٹ<;@9yVm0۵K)罂g@75% FfJ9َFww ~J65/%_D ߵ¢.*Q(93%~qpPK!A (drs/downrev.xmlDAK@Fa7in(Ecvl c{z>0ALNj W{m\8 "8xG ᰿aŝh*Ib :汐2YK?K"3R$:6ҢqiÑ^:*s:>*+ܷ̰0<܌uj<[+}T(PK-![Content_Types].xmlPK-!1_a ._rels/.relsPK-!Z[*k)drs/shapexml.xmlPK-!A (tdrs/downrev.xmlPKw_   l*     <  c $ ? 3380___PPT10.^ PK![Content_Types].xmlN0EH-J@%ǎǢ|ș$زULTB l,3;rØJB+$G]7O٭Vƶݻ!xӣ˰';\6ҥp:#NA=!:ϱ}+`5Ա(Ќ%6)<3 |Rqt vZ,A ^0{c<&C IoaK6B5 )+8Qz&(;A.nrӿFiF4 svt+9e+ C oدlpՠ첺|fv=e)w- A1%:B%dQ,BA9TZ圯%=$I=91BnF#N2MQ4Tꫪv12zgMCѤxbT6o@^ՋgޫO=?{g~lYQ:1;|׳~/L?}ۯ_0ٕ^~O_~?9賾'v=p?3kmȰ2<|fn!t;Bl I\&[4oRJ4)zƎ1v.!_ɐ3һK6"N ȑMN$]!ޖoxmF] QD%td·&+$Dz)#, 5~ C:Ol$e1f";8Q2ua$MGRy7tB=[}`+mW*Aԓw*fVt~Kk^{YiZW'Υp*1>"ネw,alV^o[o_Wb :ٶ]o⓭{1/PF=hT/ψ.J,܄#L~Bd܏%}JDxS&AbQv*-+=-!3t}'oTj}^P}߄1M h<[a:X4E6\ԖQ=;_B+DH) "*8mΤfbHeHfО5LhTCMcBjSA~h4Ec ֵR;mJ RfM 2BEtodžg "2Bv3k !s/@S![ Β AV5rt;x/V= ݏG[RSRoJ7GBʿ5eS4FyE109C h T.KWak=!inFxoZ4ͬtKn:HTg/woP[ fQS7eXivjS[LjS$ կ/̮mY#A*?[Zh/ˆ B߇<+=I&D|i7?jjTEQjPhZBVRiBaqRe_UzNo+}JxviȒ"OR*or/z!zj(Q]ԣNahpUnP/EQZFXة˭Nѭy&/޿PK! ѐ'theme/theme/_rels/themeManager.xml.relsM 0wooӺ&݈Э5 6?$Q ,.aic21h:qm@RN;d`o7gK(M&$R(.1r'JЊT8V"AȻHu}|$b{P8g/]QAsم(#L[PK-![Content_Types].xmlPK-!֧6 0_rels/.relsPK-!kytheme/theme/themeManager.xmlPK-!Xmtheme/theme/theme1.xmlPK-! ѐ' theme/theme/_rels/themeManager.xml.relsPK] : ) 0 i(   4   xh0e0e?Rectangle 2>  h"Simplified Thermal Stress Analysis# ##     xh0e0e?Rectangle 3 `p   )Reference: Sergent, J., and Krum, A., Thermal Management Handbook for Electronic Assemblies, McGraw-Hill, New York, 1998. Chapter 7 Another helpful source: Vaynman, S., Mavoori, H., Chin, J., Fine, M.E., Moran, B, and Keer, L.M., Stress management and reliability assessment in electronic packaging, National Electronic Packaging and Production Conference--Proceedings of the Technical Program (West and East), v 3, 1996, p 1711-1726.0 Z&5Y    3380___PPT10.* "- @m(     xph0e0e?Rectangle 2 `}   ITCE      xPh0e0e?Rectangle 3 `  LProblem: when one material is bonded to another with a much smaller temperature coefficient of expansion (TCE) E=TCExDT E=strain (length/length) DT=temperature differential across sample S=EY S=stress (psi/in or Pa/m) Y=modulus of elasticity (lb/in2 or Pa) When total stress (S*max dimension of sample) exceeds tensile strength, cracks will form Note that this analysis is simplified (Dr. Yee might not approve.)` PwC!Cn    3380___PPT10.(9" #P(    s 2WTA?5%8c8c    ??SCAN0263_000Picture 4SCAN0263_000"p` 7   xh0e0e?Rectangle 2 `}   k#Types of cracks from thermal stress$ $$$   3380___PPT10.0m"' `g(  1   x h0e0e?Rectangle 2 `}   eOther thermal stress properties        xPh0e0e?Rectangle 3 `  *bThe stress can cause displacement in the tangential direction. Poisson s ratio n=strain in tangential direction /strain in normal direction =eT/ eN Shear modulus G=E/2/(1+n)@ r @A>A   3380___PPT10.f" YQp9(    [A??SCAN0258_000Picture 4SCAN0258_000pk*   xh0e0e?Rectangle 2 `}   ^Die-Die Attach-Substrate      xh0e0e?Rectangle 3r NF___PPT9(  U Two types of problems caused by TCE die    , WA??SCAN0262_000Picture 5SCAN0262_000Pp 3380___PPT10." ]U0=(  02 0  x`<@'0e0e?Rectangle 2 `}   f Force required to cause breakage! !!  d 00 s A  ?5%8c8c    ?Object 4"00 U(   0 dPf@'??Text Box 6  {KIC=plain strain fracture toughness in psi-in1/2 or MPa-m1/2 Z=dimensionless constant, usually 1.2 a=microcrack length/2 J| * ?|    0 rrA??SCAN0264_000Picture 7SCAN0264_000  3380___PPT10.-B"<    4| (  4$ 4  x@'0e0e?Rectangle 2 `}   XTo Minimize Stress     4  xC@'0e0e?Rectangle 3 `f B:___PPT9 Match TCE of component and substrate as much as possible Use an intermediate layer with a TCE in between that of the die and substrate; molybdenum often used (TCE between that of silicon and alumina) Choose materials that need the lowest processing temperatures  a large amount of stress is induced on the components as they cool from the processing temp Small voids in the bond distributed uniformly over the bond can help reduce stress. However, these voids will increase thermal resistance, increasing the junction temp, so this may not be a good thing. Also, watch out for stress concentrations, such as those caused by large voids. Use compliant bonding materials, such as soft solders and soft epoxies. Pb-Sn solder balls in BGA, or J-, gull-wing, and other types of leads in surface mounted devices are good. Again, note that a bonding material with a high thermal resistance will increase Tj. Reduce temperature fluctuations due to better thermal management.4 " P D  P 3380___PPT10.8"K 8(  8 8 cG.sA??SCAN0266_000Picture 4SCAN0266_000PR+ 8  xn@'0e0e?Rectangle 2 `}   _To Minimize Stress, cont.   ` 8  x@'0e0e?Rectangle 3 `#r NF___PPT9(  >Increase bond thickness  greater ability to flex when force applied; often used with solder joints 4e "  ef  P 3380___PPT10.i"  <(  < < hJA ??SCAN0261_000Picture 4SCAN0261_000@@ ; <  x @'0e0e?Rectangle 2 `}   o'Helpful properties to use with examples( ($(   < drA ??SCAN0265_000Picture 5SCAN0265_000  3380___PPT10.@"PxXMhSAMR4AKiAT(B)ԃ6-)FmRKBC"MO 7N/RAēE1qfBZ}&ofvvggwv%_5ݾp^7u|>O*)ݓa0 I~Hs2h*P<>9vNQF5_"OXy9;eѥT D+vpViH-FuH:tѬlOT߇< quN ͽ#Ҥͼ)sաY,([~3x:EEF#/d:^9}[xHs.ck2m{-Xu"[ GO~Hous &}rєx$|dw_Nzo.c C]#%ٲA-VAhA/w.Q > xiJ3\'NL|<9pke|l# i頉̥3Y"/+p&K~bu²@}cc lд.V@asSۆ_Cd*9g"X2avuRz*\d7BW/|=`ƙZ{o`LX ,A#7AoQXQ9Xh@uP [L4^ɊROc<VSÿ/irHF@A.EwXOh+'0 `h   $Simplified Thermal Stress AnalysisMAE310C nokamoto5Microsoft Office PowerPoint@+@@PPUG;  pp  @pA x@(xƥνέƜ便֜ƽƜޭƭ֥ƥ֥筭ޥέ֥֜Ƅεƭs{ΥƄνƵs{{ΜΔν祥ν筥ﵵ{ֵޥﭵƽέ޵{ƽƵ޽ޭƜ֥ﭭƭΥ֭ƽƽ便ޥ޵ﭵƽ{s{甌Ɯ֥ޔ甔֥ksޜ罽ƽ焄祥skkƽƽ罽焄絽޵Ƅ{sΥƵƔνތ{Ƶ絭޽ƭֵsksνsksΔ筭Ƶss{֔Ƶƭスνsksƽ֭眥{֥ƥƵƌ{{Υ{ƔƜƽƜƜƽֵ֥{ֵƽΜﭥ{{{{ޭνƥƜ֥֥{ssƽs{{{sޜss{{{s{ƥ֜ν֥cksƽckkZck{sk{{sssksssssֵν{{sƵkkcƽ{{sskssƵƽƵﭵƵΥƽƽ祭ƜƭƔޭƵƽƽƭƽ罽ƜέޥƥƽƵƽƄƽƥ޽便ƽƽƵskƽs{Ƶsss{s便{{{{{{s{sksޭsssΔƽ{{{{ƥﭭބ{ss{s罽ƽ{スތֽƽ{sƽススƽ祭ތƵƔޥƽ޵ƽ֔ﵵޭֽƽﭭ֭޽ƵƽֽƵ筭ޭ{{{{s{{便{{{֥ƵέƽƄƽƵ{{s΄{{sƭ{scƭ֥֭ޔν絵ތ{{Μޥƌέ{s{ƽƽν֥ƭƥޭ޽ΜƭƜ{kZƭΥޥ֥ޥΜν罽֥ޭ祭ƭƥƵ֜{Ƶƽ{ƵνsތΜƔ絵ƽsss絵ֵέέﭭֽ筭筭ƽ޵֭έεƭޥ祭޽ƽε筭Ƶ{kk{έcksΥޭ޽ν֥{s{ޜ{ss{֥{s{ZRcƽƔ{{sޥޥΜss{֭έ֜έsskΥέƽΥΥ֥cck{kkένƥޥΥck{ޥƥνƽƽ{{{cccƵƜƽ{{ν{{Υ{ƽ{{sޥss{{skνν֜{{֌{sskss{ss֌{{sƄ{{{s{{{{ss{έƄ{sssssƵZZRνƵs{{ޜ県ssss{Ό{{{{{{sss{ss{{筭ΥƔccc{kcRZkkcZskRZZZZR{{sscZ{!RRRZRR֥ZZZRRR{JB9JB1RJBkRJƌ{kscRscJJJkkkRJ9֌{sƵJZcJRcJJJRRR)11RB9kZJZccRRRRZcscR{kZBJRZRJZZc)))֌{s{{119cZRΌ{k1199))kZRskRsckZRRZk99B޽֌{s{BBB΄scRRRccc999ƽZZcRRR9BB{scƽƽs{ZZRBBBƵ֥JRRRRRskck{999scƽJRkޭJZk֭ksskccksRJBcRJRcsJZkZZRssskZRBJRBRZcsƵ֔{BBB99BνJBB{{{199JRc99JZZRkssZRJBBBBBBscRZRRsss!))s{νRck{{sRZc119RZkRRJss{JJBRZkskkZckBB9JJBRB9999RB9ZJBRcsRZkcs9BJ9JRZk{έΔ{sƽcsν{ƭBRcBBJB99999BBBscRZcsk{Ƶs{ƵkZJJB9J99JRk9BBcRJ9BJJRZ{kRJBcRJRcsRRk{ƵBJRBRZcsƵ֔sk{JBBZZZBBJ{kZRZkƭJRcBBJZZZZZZ!!)BBB999scRkkk)19νs{ν省9BJRBBRZk!)ZZZZZZ!)1Ƶs111{ss119ZRR1))skkƽJB9!skZR9BJJZk9BJ9BR9JRRZcƔ{Ƅsks{9BRƭBJZ911JRZ999!)9!)9ν1)!csƵZcsνs{Ƶs{111{ss911JRkƵRZkƽ99B199ƽ{999kss{sscccZZZƽBJR19BskcƽZccccccksJRccccƽss{kccs{{ccckks{s{ZZZs{ν999ƽ)!!ƽ{{cccZZc{{ss{{ccccs{{JRZ{9BJ{{cZZ{ƭƄBJRRRJƽBRcs{ƵRZkJJRƽcZZֵε՜.+,0    On-screen Show (4:3)91^7  ArialCalibriSymbolDefault DesignMicrosoft Equation 3.0#Simplified Thermal Stress AnalysisTCE$Types of cracks from thermal stress Other thermal stress propertiesDie-Die Attach-Substrate#Total strain when both cases occurStress due to processingStress concentrationsPowerPoint Presentation!Force required to cause breakageTo Minimize StressTo Minimize Stress, cont.(Helpful properties to use with examples  Fonts UsedThemeEmbedded OLE Servers Slide Titles  _nokamotonokamoto  !"#$%&'()*+,-./0123456789:;<=>?@ABCDEFGHIJKLMNOPQRSTUVWXYZ[\]^_`abcdefghijklmnopqrstuvwxyz{|}~      !"#$%&'()*+,-./123456789:;<=>?@ABCDEFGHIJKLMNOPQRSTUVWXYZ[\]^_`abcdefghijklmnopqrstuvwxyz{|}~Root EntrydO)PicturesHCurrent UserSummaryInformation(0PowerPoint Document(DocumentSummaryInformation8